This clean room houses the necessary equipment for microfabrication of semiconductor devices and sensor arrays. The laboratory includes thin film coating systems (sputter, thermal evaporation and e-beam evaporation), a mask aligner, an inductively coupled plasma reactive ion etching system, a wafer dicer, a surface profiler, a probe station, and a flip-chip aligner bonder. This laboratory is used for the development of microfabrication processes utilized in the realization of photonic and electronic semiconductor devices and sensor arrays.