Prof.
Dr. Tayfun AKIN
ResearcherID Link (http://www.researcherid.com/rid/O-6924-2015)
Book Chapter
T. Akin, “CMOS-based Thermal Sensors” in Advanced Micro
& Nanosystems Volume 2: CMOS-MEMS, Edited by H. Baltes, O.
Brand, G.K. Fedder, C. Hierold, J. Kornivk, O. Tabata, Wiley-VCH, 2005. AMN-Flyer
International Journal Publications
71) B. G.
Dimez, T. Akin, and Y. E. Kalay, “Temperature-Dependent Evolution of
Al-Ge Microstructures for Wafer-Level Vacuum Packaging of MEMS Devices,” Sensor
and Actuators A: Physical, Vol. 384, 116281, April 2025. 10.1016/j.sna.2025.116281
70) G. D.
Aydin, O. S. Akar, and T. Akin, “Wafer Level Vacuum Packaging of
MEMS-Based Uncooled Infrared Sensors,” Micromachines Journal, Vol. 15, Iss. 8,
pp. 935-, Aug. 2024. 10.3390/mi15080935
69) S. Kocak and T. Akin, “Energy-Efficient Switching Method using Input-Swapping for High-Resolution Successive Approximation Register Analog-to-Digital Converters,” Electronics Letters Journal, Vol. 60, Iss. 9, May 2024. 10.1049/ell2.12873
68) B. Atik, E. Dirican, O. Demirörs, H. Altan, O. Esenturk, M.
Yildirim, and T. Akin, “Tuning Structural, Electrical, and THz
Optical Properties of VxOy Films with W-doping,” Journal of Alloys and
Compounds, Vol. 903, 15 May 2022, 163922; 10.1016/j.jallcom.2022.163922
67) M. M. Torunbalci, H. D.
Gavcar, F. Yesil, S. E. Alper, and T.
Akin, “An All-Silicon Process Platform for Wafer-Level Vacuum Packaged MEMS
Devices,” IEEE Sensors Journal,
2021. 10.1109/JSEN.2021.3073928
66) K. Akel, M. Hostut, T. Akin, and Y. Ergün, “Interband
Optical Absorption obtained by Pseudopotential Method for Type-II InAs/GaSb SL
Photodetectors,” Journal of Physics
D: Applied Physics, Vol. 54, No. 19, pp. 1951032021, Feb. 2021. 10.1088/1361-6463/abe3ae
65) O. Temel, Y. E. Kalay,
and T. Akin, “Wafer-Level
Low-Temperature Solid-Liquid Inter-Diffusion Bonding with Thin Au-Sn Layers for
MEMS Encapsulation,” IEEE/ASME Journal
of Microelectromechanical Systems, Vol. 30, No. 1, pp. 64-71, Feb.
2021. 10.1109/JMEMS.2020.3040039
64) M. Y. Tanrikulu, C.
Yildizak, A. K. Okyay, O. Akar, A. Sarac, and T. Akin, "Realization of Single Layer Microbolometer Detector
Pixel Using ZnO Material," IEEE Sensors Journal,
Vol. 20, Iss: 17, pp. 9677-9684, May 2020. 10.1109/JSEN.2020.2992991
63) G. Demirhan Aydin and T. Akin, “Resonance-Based Temperature
Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process,” Adv. Mater. Lett., 11 (1),
20011462 (1-8), Jan. 2020. 10.5185/amlett.2020.011462
62) I. Comart, C.
Cetintepe, E. Sagiroglu, S. Demir, and T.
Akin, “Development and Modeling of a Wafer-Level BCB Packaging Method for
Capacitive RF MEMS Switches,” IEEE/ASME Journal
of MicroElectroMechanical Systems, Vol. 28, No. 4, pp.
724-731, August 2019. 10.1109/JMEMS.2019.2912745
61) R. Cetin and T. Akin, “Numerical and Experimental
Investigation into LWIR Transmission Performance of Complementary Silicon
Subwavelength Antireflection Grating (SWARG) Structures,” Scientific Reports, Vol. 9, No. 1, p. 4683, March
2019. 10.1038/s41598-019-41107-2
60) M. Hostut, T. Tansel,
A. Kilic, T. Akin, and Y. Ergun,
“The Detailed Analysis of Wavefunction Overlaps for InAs/AlSb/GaSb Based
N-structure Type-II SL pin Photodetectors,” Physica
Scripta, Vol. 94, No. 7, pp. 075007-075012, April 2019. 10.1088/1402-4896/ab13f9
59) S. B Yarman, O.
Palamutcuogullari, I. Kaya, O. Kizilbey, A. Aksen, T. Akin, Z. L. Ozkan, I. Oksar, and T. Nesimoglu, “Microwave
Engineering Expertise in Turkey,” IEEE
Microwave Magazine, Vol. 19, No. 3, pp. 135-140, May 2018. 10.1109/MMM.2018.2802326
58) K. Demirel, E. Yazgan,
S. Demir, and T. Akin, “A folded leg
Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer,” Microsystem Technologies-Micro-and Nanosystems-Information Storage
and Processing Systems, Vol. 23, Iss. 5, pp. 1191-1200, Springer, May
2017. 10.1007/s00542-016-2892-5
57) A. Aydemir, Y.
Terzioglu, and T. Akin, “A New
Design and a Fabrication Approach to Realize a High Performance Three Axes
Capacitive MEMS Accelerometer,” Sensors
and Actuators A, Vol. 244, pp. 324-333, June 2016. 10.1016/j.sna.2016.04.007
56) S. H. Altinoluk, H. E.
Ciftpinar, O. Demircioglu, F. Es, G. Baytemir, O. Akar, A. Aydemir, A. Sarac, T. Akin, and R. Turan, “Light Trapping
by Micro and Nano-Hole Texturing of Single-Crystalline Silicon Solar Cells,” Elsevier Energy Procedia, pp.
291-296, 2016. 10.1016/j.egypro.2016.07.081
55) T. Kose, K. Azgin, and T. Akin, “Design and Fabrication of a
High Performance Resonant MEMS Temperature Sensor,” Journal of Micromechanics and Microengineering, March
2016. 10.1088/0960-1317/26/4/045012
54) K. Demirel, S. Demir,
E. Yazgan, and T. Akin, “A New
Temperature-Tolerant RF MEMS Switch Structure Design and Fabrication for
Ka-Band Applications,” IEEE/ASME Journal
of Microelectromechanical Systems, Vol. 25, No. 1, pp. 60-68, Feb.
2016. 10.1109/JMEMS.2015.2485659
53) M. M. Torunbalci, S. E.
Alper, and T. Akin, “A Method for
Wafer Level Hermetic Packaging of SOI-MEMS Devices with Embedded Vertical
Feedthroughs using Advanced MEMS Process,” Journal
of Micromechanics and Microengineering, Vol. 25, 125030, pp. 1-11, 2015. http://dx.doi.org/10.1088/0960-1317/25/12/125030
52) S. Tez, U. Aykutlu, M.
M. Torunbalci, and T. Akin, “A
Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die,” IEEE/ASME Journal of
Microelectromechanical Systems,Vol. 24, No. 5, pp. 1264-1274, October 2015. 2015. 10.1109/JMEMS.2015.2451079
51) K. Demirel, S. Demir;
E. Yazgan, and T. Akin, “Cantilever
Type Radio Frequency MEMS Shunt Capacitive Switch Design and Fabrication,” J. Micro/Nanolith. MEMS MOEMS
14(3), 035005 (2015). 10.1117/1.JMM.14.3.035005
50) M. M. Torunbalci, S. E.
Alper, and T. Akin, “Advanced MEMS
(aMEMS) Process for Wafer Level Hermetic Encapsulation of MEMS Devices using
SOI Cap Wafers with Vertical Feedthroughs,” IEEE/ASME
Journal of Microelectromechanical Systems, Vol. 24, No. 3, pp. 556-564,
June 2015. 10.1109/JMEMS.2015.2406341
49) M. M. Torunbalci, S. E.
Alper, and T. Akin, “Wafer Level
Hermetic Sealing of MEMS Devices with Vertical Feedthroughs using Anodic
Bonding,” Sensors and Actuators A,
Vol. 224, pp. 169-176, April 2015. 10.1016/j.sna.2015.01.034
48) C. Cetintepe, E. S.
Topalli, S. Demir, O. A. Civi, and T.
Akin, “A Fabrication Process based on Structural Layer Formation using
Au–Au Thermocompression Bonding for RF MEMS Capacitive Switches and Their
Performance,” Int. Journal of
Microwave and Wireless Technologies, Vol. 6, No. 5, pp. 473-480, July
2014. 10.1017/S1759078714000968
47) U. Sonmez, H. Kulah,
and T. Akin, “A ΣΔ Micro
Accelerometer with 6 µg/√Hz Resolution and 130 dB Dynamic Range,” Analog Integrated Circuits and Signal
Processing, Vol. 81, No. 2, pp 471-485,
November 2014. 10.1007/s10470-014-0393-y
46) E. Battal, S. Bolat, M.
Y. Tanrikulu, A. K. Okyay, and T. Akin,
“Atomic Layer Deposited Zinc-Oxide as Tunable Uncooled Infrared Microbolometer
Material,” Physica Status Solidi A:
Applications and Materials Science, Vol. 211, No. 11, pp.
2475–2482, November 2014. 10.1002/pssa.201431195
45) I. Comart, K. Topalli,
S. Demir, and T. Akin, “Microwave
Characterization of a Wafer-Level Packaging Approach for RF MEMS Devices Using
Glass Frit Bonding,” IEEE Sensors
Journal, Vol. 14, No. 6, pp. 2006-2011, June 2014. 10.1109/JSEN.2014.2308256
44) J. Musayev, Y.
Adıgüzel, H. Kulah, Selim Eminoglu, and T. Akin, “Label-free DNA Detection Using a Charge Sensitive CMOS
Microarray Sensor Chip,” IEEE Sensors
Journal, Vol. 14, No. 5, pp. 1608-1616, May 2014. 10.1109/JSEN.2014.2301693
43) J. Musayev, C. Altiner,
Y. Adıgüzel, H. Kulah, Selim Eminoglu, and T. Akin, “Capturing and Detection of MCF-7 Breast Cancer Cells with
a CMOS Image Sensor,” Sensors and Actuators A, Vol. 215, pp.
105-114, August 2014. 10.1016/j.sna.2013.12.003
42) S. Sonmezoglu, S. E.
Alper, and T. Akin, “An
Automatically Mode-Matched MEMS Gyroscope with Wide and Tunable Bandwidth,” IEEE/ASME Journal of Microelectromechanical
Systems, Vol. 23, No. 2, pp. 284-297, April 2014. 10.1109/JMEMS.2014.2299234
41) M. Unlu, S. Demir, and T. Akin, “A 15-40 GHz Frequency
Reconfigurable RF MEMS Phase Shifter,” IEEE
Transactions on Microwave Theory and Techniques, Vol. 61, No. 8, pp.
2865-2877, August 2013. 10.1109/TMTT.2013.2271995
40) O. Aydin and T. Akin, “A Bulk-Micromachined
Fully Differential MEMS Accelerometer With Split Interdigitated Fingers,” IEEE Sensors Journal, Vol. 13,
No. 8, pp. 2914-2921, August 2013. 10.1109/JSEN.2013.2264667
39) M. Unlu, S. Demir, and T. Akin, “Triple Stub Circuit Topology
as Simultaneous Insertion Phase, Amplitude, and Impedance Control Circuit for
Phased Array Applications,” IET
Microw. Antennas Propag., Vol. 6, Iss. 13, pp. 1399–1406, 2012. 10.1049/iet-map.2011.0275
38) K. Azgin, T. Akin, and L. Valdevit, “Ultra High
Dynamic Range Resonant MEMS Load Cells for Micromechanical Test Frames,” IEEE/ASME Journal of
Microelectromechanical Systems, Vol. 21, No. 6, pp. 1519-1529, Dec.
2012. 10.1109/JMEMS.2012.2211576
37) A. Aydemir and T. Akin, “Prevention of Sidewall
Redeposition of Etched By-Products in Dry Au Etch Process,” Journal of Micromechanics and Microengineering, Vol. 22, No. 7, 074004, pp. 1‑6,
June 2012. 10.1088/0960-1317/22/7/074004
36) E. Tatar, S. E. Alper,
and T. Akin, “Quadrature Error
Compensation and Corresponding Effects on the Performance of Fully Decoupled
MEMS Gyroscopes,” IEEE/ASME Journal of
MicroElectroMechanical Systems, Vol. 21, No. 3, pp. 656-667, June 2012. 10.1109/JMEMS.2012.2189356
35) O. Bayraktar, O.
Aydin-Civi, and T. Akin, “Beam
Switching Reflectarray Monolithically Integrated with RF MEMS Switches,” IEEE Transactions on Antennas &
Propagation, Vol. 60, No. 2, pp. 854-862, Feb.2012. 10.1109/TAP.2011.2173099
34) C. E. Cansoy, H. Y.
Erbil, O. Akar, T. Akin, “Effect of
Pattern Size and Geometry on the Use of Cassie-Baxter Equation for
Superhydrophobic Surfaces,” Colloids
and Surfaces A: Physicochemical and Engineering Aspects, Vol. 386, pp.
116-124, August 2011. 10.1016/j.colsurfa.2011.07.005
33) A. Torrents, K. Azgin,
S. W. Godfrey, E. S. Topalli, T. Akin,
and L. Valdevit, “MEMS Resonant Load Cells for Micro-Mechanical Test Frames:
Feasibility Study and Optimal Design,” Journal
of Micromechanics and Microengineering, Vol. 20, No. 12, 125004, pp.
1-17, Dec. 2010. 10.1088/0960-1317/20/12/125004
32) B. Bayram, O. Akar, and
T. Akin, “Plasma-Activated Direct
Bonding of Diamond-on-Insulator Wafers to Thermal Oxide Grown Silicon Wafers,” Diamond and Related Materials,
Vol. 19, No. 11, pp. 1431-1435, Nov. 2010. 10.1016/j.diamond.2010.08.015
31) I. E. Ocak, R. Kepenek,
H. Kulah, and T. Akin, “A High
Performance Sigma-Delta Readout Circuitry for µg Resolution
Microaccelerometers,” Analog
Integrated Circuits and Signal Processing, Vol. 64, No. 2, pp.137-145, August 2010 10.1007/s10470-009-9433-4
30)
M. Unlu, K.
Topalli, H. I. Atasoy, S. Demir, O. Aydin Civi, and T. Akin, “Hybrid Connection of RF MEMS and SMT Components in an
Impedance Tuner,” AEU International Journal of Electronics and
Communications, Vol. 64, No.
8, pp. 748-756, August 2010. 10.1016/j.aeue.2010.01.008
29)
K. Topalli, E. Erdil,
O. Aydin Civi, S. Demir, S. Koc, and T.
Akin, “Tunable Dual-Frequency RF MEMS Rectangular Slot Antennas,” Sensors and Actuators A,
Vol. 156, No. 2, pp. 373-380, December 2009. 10.1016/j.sna.2009.10.005
28)
K. Topalli, M. Unlu, H.
I. Atasoy, S. Demir, O. A. Civi, and T.
Akin, "Empirical Formulation of Bridge Inductance in Inductively Tuned
RF MEMS Shunt Switches," Progress In Electromagnetics Research,
PIER 97, pp. 343-356, 2009. 10.2528/PIER09092502
27)
E. Ekmekci, K. Topalli, T. Akin, and
G. Turhan-Sayan, “A Tunable Multi-Band Metamaterial Design Using Micro-Split
SRR Structures,” Optics Express, Vol. 17, No. 18, pp. 16046-58,
August 2009. 10.1364/OE.17.016046
26)
K. Sahin, E. Sahin, S. E. Alper, and T.
Akin, “A
Wide-Bandwidth and High-Sensitivity Robust Microgyroscope,” Journal of Micromechanics and
Microengineering, Vol. 19, No. 7,
074004, pp. 1-8, July 2009. 10.1088/0960-1317/19/7/074004
25)
J. Perruisseau-Carrier,
K. Topalli, and T. Akin, “Low-loss
Ku-band Artificial Transmission Line with MEMS Tuning Capability,” IEEE Microwave and Wireless Components
Letters, Vol. 19, No. 6, pp. 377-379, June 2009. 10.1109/LMWC.2009.2020022
24)
E. Sagiroglu Topalli, K. Topalli, S. E. Alper, T. Serin, and T. Akin, “Pirani Vacuum Gauges using
Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS
Vacuum Packaging,” IEEE Sensors Journal, Vol. 9, No. 3, pp.
263-270, March 2009. 10.1109/JSEN.2008.2012200
23)
S. E. Alper, Y. Temiz, and T. Akin,
“A Compact Angular Rate Sensor System using a Fully-Decoupled Silicon-on-Glass
MEMS Gyroscope,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol.
17, No. 6, pp. 1418-1429, Dec. 2008. 10.1109/JMEMS.2008.2007274
22)
B. Alaca, K. B. Toga, O. Akar, and T.
Akin, “Strain-Controlled
Bulge Test,” Journal
of Materials Research, Vol. 23, No. 12, pp.
3295-3302, Dec. 2008. 10.1557/JMR.2008.0395
21)
K. Topalli, O. Aydin
Civi, S. Demir, S. Koc, and T. Akin,
“A Monolithic Phased Array using 3-bit Distributed RF MEMS Phase Shifters,” IEEE
Trans. Microwave Theory Tech. Techniques, Vol. 56, pp. 270-277, February
2008. 10.1109/TMTT.2007.914377
20)
S. Eminoglu, M. Y. Tanrikulu, and T.
Akin, “A Low-Cost 128x128 Uncooled Infrared Detector Array in CMOS
Process,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 17,
No. 1, pp. 20-30, February 2008. 10.1109/JMEMS.2007.910235
19)
B. Okcan and T. Akin, “A Low-Power
Robust Humidity Sensor in a Standard CMOS Process,” IEEE Transactions on
Electron Devices, Vol. 54, No. 11, pp. 3071-3078, November 2007. 10.1109/TED.2007.907165
18)
S. E. Alper, I. E.
Ocak, and T. Akin, “Ultra-Thick and High-Aspect-Ratio Nickel
Microgyroscope using EFABTM Multi-Layer Additive Electroforming,” IEEE/ASME
Journal
of MicroElectroMechanical Systems, Vol. 16, No. 5, pp. 1025-1035, October 2007. 10.1109/JMEMS.2007.902431
17)
E. Erdil, K. Topalli, M. Unlu, O. Aydin Civi, and T. Akin, "Frequency Tunable Microstrip Patch Antenna using RF
MEMS Technology," IEEE Trans. Antennas and Propagation, vol.55, no.4, p.1193-1196, April 2007. 10.1109/TAP.2007.893426
16)
S. E. Alper, K. Azgin,
and T. Akin, “A High-Performance Silicon-on-Insulator MEMS
Gyroscope Operating at Atmospheric Pressure,” Sensors and Actuators A,
Vol. 135/1, pp. 34-42, March 2007. 10.1016/j.sna.2006.06.043
15)
S. E. Alper, K. M.
Silay, and T. Akin, “A Low-Cost
Rate-Grade Nickel Microgyroscope,” Sensors
and Actuators A, Vol. 132/1, pp. 171-181, November 2006. 10.1016/j.sna.2006.03.031
14)
K. Topalli, M. Unlu, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “New Approach for Modeling Distributed MEMS Transmission Lines,”
IEE Proc. Microwaves, Antennas & Propagation, Vol. 153, pp.152-162, April 2006. 10.1049/ip-map:20050098
13)
S. E. Alper and T.
Akin, A Single-Crystal Silicon
Symmetrical and Decoupled MEMS Gyroscope on an Insulating Substrate,” IEEE/ASME
Journal
of MicroElectroMechanical Systems, Vol. 14, No. 4, pp. 707-717, August 2005. 10.1109/JMEMS.2005.845400
12) S. E. Alper and T. Akin,
" Symmetrical and Decoupled Nickel Microgyroscope on Insulating Substrate,"
Sensors and Actuators A, Vol.
115/2-3, pp. 336‑350, 2004. 10.1016/j.sna.2004.04.041
11) S. Eminoglu, D. Sabuncuoglu Tezcan, M.Y. Tanrikulu, and T. Akin, “Low-Cost Uncooled Infrared
Detectors in CMOS Process,” Sensors and Actuators A, Vol. 109/1-2, pp. 102-113,
Dec. 2003. 10.1016/j.sna.2003.08.013
10) H. Külah and T. Akin, “A Current Mirroring
Integration Based Readout Circuit for High Performance Infrared FPA
Applications,” IEEE Transactions on
Circuits and Systems II: Analog and Digital Signal Processing,
Vol. 50, No. 4, pp. 181 -186, April 2003.
10.1109/TCSII.2003.807758
9) D. Sabuncuoglu Tezcan,
S. Eminoglu, and T. Akin, “A Low
Cost Uncooled Infrared Microbolometer Detector in Standard CMOS Technology,” IEEE Trans. on Electron Devices, Vol. 50, No. 2, pp.
494-502, Feb. 2003. 10.1109/TED.2002.807453
8) S. E. Alper and T. Akin,
"A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation
Modes," Sensors and Actuators A, Vol. 97-98C, pp. 337-348,
April 2002. 10.1016/S0924-4247(01)00860-3
7) O. Akar, T. Akin, and K.
Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure
Sensor," Sensors and Actuators A, Vol.95/1, pp. 29-38,
December 2001. 10.1016/S0924-4247(01)00753-1
6) T. Akin, B. Ziaie, S. A.
Nikles, and K. Najafi, “A Modular Micromachined High-Density Connector System
for Biomedical Applications,” IEEE Transactions on Biomedical Engineering,
Vol. 46, No.4, pp.471-480, April 1999. 10.1109/10.752944
5)
T. Akin, Z. Olgun, O. Akar, and H. Kulah,
"An Integrated Thermopile Structure with High Responsivity Using Any
Standard CMOS Technology," Sensors and Actuators A
66, pp. 218-224, April 1998. 10.1016/S0924-4247(98)00038-7
4) T. Akin, K. Najafi, and R.M.
Bradley, "A Wireless Implantable Multichannel Digital Neural Recording
System for a Micromachined Sieve Electrode," IEEE Journal of Solid-State
Circuits, Vol. 33, No.1, pp.109-118, January 1998. 10.1109/4.654942
3) R. M. Bradley, X. Cao, T. Akin,
and K. Najafi, "Long Term Chronic Recording from Peripheral Sensory Fibers
Using a Sieve Electrode Array," The Journal of Neuroscience Methods,
Vol. 73, pp. 177-186, 1997. 10.1016/S0165-0270(97)02225-5
2)
T. Akin, K. Najafi, R. Smoke, and R. M.
Bradley, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration
Applications," IEEE Trans. on Biomedical Engineering, Vol.
BME-41, No. 4, pp. 305-313, April 1994. 10.1109/10.284958
1) R. M. Bradley, R.
Smoke, T. Akin, and K. Najafi, “Functional Regeneration of
Glossopharyngeal Nerve through Micromachined Sieve Electrode Arrays,” Brain
Research Journal, Vol. 594, pp. 84-90, 1992. 10.1016/0006-8993(92)91031-9
International Conference Publications
158) Y. Mart, A. A. Aslan,
K. Buyukdemirci, D. Lee, T. Akin, and A. Camlica, “Performance
Evaluation of Small Pixel-Sized Gd2O2S and CsI CMOS X-ray
Detectors,” Medical Imaging 2025: Physics of Medical Imaging, SPIE Vol. 13405,
1340538, pp. 1-15, San Diego, April 2025. 10.1117/12.3047529
157) O. Demirörs, B. Atik,
E. Dirican, H. Altan, O. Esenturk, M. Yildirim, and T. Akin, “Optimization of a Microbolometer Pixel for Operation in
the Sub-1 THz Region,” SPIE Optical
Engineering + Applications, Terahertz Emitters, Receivers, and Applications XII,
SPIE 11827, p. 118270O, San Diego, U.S.A., August 2021.
156) B. Atik, E. Dirican,
O. Demirörs, H. Altan, O. Esenturk, M. Yildirim, and T. Akin, “Investigation of Doped and Undoped VOx Films for
Terahertz Microbolometer Applications,” SPIE
Optical Engineering + Applications, Terahertz Emitters, Receivers, and
Applications XII, SPIE 11827, p. 118270J, San Diego, U.S.A., August 2021.
155) A. Aydemir and T. Akin “Self-Packaged Three Axis
Capacitive MEMS Accelerometer” 2020 IEEE 33rd Int. Conf. on Micro Electro
Mechanical Systems (MEMS), Vancouver, BC, CANADA, 18-22 Jan. 2020. 10.1109/MEMS46641.2020.9056192
154) T.
Akin, "Low-Cost LWIR-Band CMOS Infrared (CIR) Microbolometers for High
Volume Applications," 2020 IEEE 33rd Int. Conf. on Micro Electro
Mechanical Systems (MEMS), Vancouver, BC, CANADA, 18-22 Jan. 2020. 10.1109/MEMS46641.2020.9056383
153) F. Tankut, M.H.
Cologlu, H. Ozturk, G. Cilbir, O.S. Akar, and T Akin, “A 160x120 LWIR-band CMOS Infrared (CIR) microbolometer,” SPIE Defense and Commercial Sensing
Symposium, Infrared Technology and Applications XLV, SPIE 11002, p.
110021Q, Baltimore, U.S.A, April 2019. 10.1117/12.2521484
152) M. Y. Tanrikulu, C.
Yildizak, A. K. Okyay, O. Akar, A. Sarac, and T. Akin, “Single Layer Microbolometer Detector Pixel Using ZnO
Material,” SPIE Defense and Commercial
Sensing Symposium, Infrared Technology and Applications XLIV, SPIE 10624,
p. 1062417, Orlando, Florida, U.S.A., April 2018. 10.1117/12.2302996
151) O. Erturk and T. Akin, “Design and Implementation of
High Fill-Factor Structures for Low-Cost CMOS Microbolometers,” 2018 IEEE Micro Electro Mechanical Systems
(MEMS), Belfast, NORTH IRELAND, Jan 23-25, 2018. 10.1109/MEMSYS.2018.8346649
150) R. Cetin, O. Erturk,
and T. Akin, “Design, Analysis and
Implementation of Quarter-wave Absorber Structure for Uncooled Infrared
Detectors with High Fill Factor,” 2018 43rd International Conference on
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Nagoya, JAPAN, Sep
09-14, 2018. 10.1109/IRMMW-THz.2018.8510442
149) S. Eminoglu, M. A.
Gulden, O. S. Incedere, S. T. Soyer, C. Yalcin, C. M. B. Ustundag, U. Eksi, and
T. Akin, “A 1024x768-12um Digital
ROIC for Uncooled Microbolometer FPAs,” SPIE
Defense and Commercial Sensing Symposium, Infrared Technology and Applications
XLIII,, SPIE 10177, p. 0177122, Anaheim, U.S.A, April 2017. 10.1117/12.2263532
148) F. Tankut, M. H.
Cologlu, H. Askar, H. Ozturk, H. K. Dumanli, F. Oruc, B. Tilkioglu, B.
Ugur, O. Akar, M. Tepegoz, and T. Akin, “An 80x80 microbolometer type
thermal imaging sensor using the LWIR-band CMOS infrared (CIR) technology,” SPIE Defense and Commercial Sensing
Symposium, Infrared Technology and Applications XLIII, SPIE 10177, p.
01771X, Anaheim, U.S.A, April 2017. 10.1117/12.2275161
147) T. Arslan, G. Cilbir,
M. Tepegoz, and T. Akin, “An
advanced presence detection system using the CMOS Infrared (CIR) technology,” SPIE Defense and Commercial Sensing
Symposium, Infrared Technology and Applications XLIII, SPIE 10177, p. 101771Y, Anaheim, U.S.A, April 2017.
10.1117/12.2275165
146) S. Tez, M. M.
Torunbalci, T. Akin, “A Novel Method
for Fabricating MEMS Three-Axis Accelerometers using Low Temperature Au-Sn
Eutectic Bonding,” 15th IEEE
Sensors Conference, Orlando, USA, Oct. 2016. 10.1109/ICSENS.2016.7808705
145) T. Kose, Y. Terzioglu,
K. Azgin, and T. Akin, “A
Single-Mass Self-Resonating Closed-Loop Capacitive MEMS Accelerometer,” 15th
IEEE Sensors Conference, Orlando, USA, Oct. 2016. 10.1109/ICSENS.2016.7808711
144) M. K. Aslan, Y.
Demircan, E. Ozgur, U. Gunduz, S. Eminoglu, H. Kulah, and T. Akin, “A High Throughput Lab-On-A-Chip System for Label Free
Quantification of Breast Cancer Cells Under Continuous Flow,” 26th Anniversary
World Congress on Biosensors, Sweden, May 2016. 10.1016/j.protcy.2017.04.028
143) S. Eminoglu, O.S.
Incedere, N. Bayhan, M. Isikhan, S.T. Soyer, C.M.B. Ustundag, S. Kocak, O.
Turan, U. Eksi, and T. Akin, “A
640x512-20um Dual-Polarity ROIC for MWIR and LWIR Hybrid FPAs,” SPIE Defense and Security Symposium, Infrared
Technology and Applications XLII, SPIE 9819, p. 981928, Baltimore, U.S.A,
April 2016. 10.1117/12.2224743
142) T. Kose, K. Azgin, and
T. Akin, “Temperature Compensation
of Capacitive MEMS Accelerometer by Using MEMS Oscillator,” 2016 IEEE Int'l Symposium on Inertial
Sensors & Systems (ISISS 2016), pp. 33-36, California, USA, February
2016. 10.1109/ISISS.2016.7435538
141) Y. Terzioglu, T. Kose,
K. Azgin, and T. Akin, “A Simple
Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical
Electrodes for Differential Sensing,” IEEE
Sensors Conference, pp. 525-527, Busan, South Korea, November 1-4, 2015. 10.1109/ICSENS.2015.7370306
140) A. Aydemir and T. Akin, “Fabrication of a Three-Axis
Capacitive MEMS Accelerometer on a Single Substrate,” IEEE Sensors Conference, Busan, South Korea, November 1-4, 2015. 10.1109/ICSENS.2015.7370307
139) A. Aydemir and T. Akin, “An Ultimate Capacitive MEMS
Vertical Accelerometer with Differential Sensing Capability,” The 26th Micromechanics and Micro Systems
Europe Workshop, (MME’15), Toledo, Spain, September 20-23, 2015.
138) A. Aydemir and T. Akin, “DRIE Process Optimization to
Achieve High Aspect Ratio for Capacitive MEMS Sensors,” The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15),
Toledo, Spain, September 20-23, 2015.
137) A. Aydemir and T. Akin, “Process Development for the
Fabrication of a Three Axes Capacitive MEMS Accelerometer,” The 29th European Conference on Solid -State
Transducers (Eurosensors 2015), pp. 727-730, Freiburg, Germany, September
6-9, 2015. 10.1016/j.proeng.2015.08.773
136) B. Kebapci, F. Tankut,
H. Altan, and T. Akin “Detection of
the mm-wave radiation using a low-cost LWIR microbolometer camera from a
multiplied Schottky diode based source,” SPIE Defense and Security Symposium,
Millimetre Wave and Terahertz Sensors and Technology VIII, SPIE 9651, Toulouse,
France, pp. 96510L-96510L-5, September 2015. 10.1117/12.2199450
135) M. M. Torunbalci, S.
E. Alper, and T. Akin, “The Advanced
MEMS (aMEMS) Process for Fabricating Wafer Level Vacuum Packaged SOI-MEMS
Devices with Embedded Vertical Feedthroughs,” The 18th International Conference on Solid-State Sensors, Actuators and
Microsystems (TRANSDUCERS 2015), pp. 472-475, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7180963
134) H. D. Gavcar, K.Azgin,
S. E. Alper, and T. Akin, “An
Automatic Acceleration Compensation System for A Single-Mass MEMS Gyroscope,” The 18th International Conference on
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), pp.
19-22, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7180850
133) F. Yesil, S. E. Alper,
and T. Akin, “An Automatic Mode
Matching System for a High Q-Factor MEMS Gyroscope using a Decoupled
Perturbation Signal,” The 18th
International Conference on Solid-State Sensors, Actuators and Microsystems
(TRANSDUCERS 2015), pp. 1148-1151, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7181131
132) Y. Demircan, S. Orguc, J. Musayev, E. Ozgur, M. Erdem, U. Gunduz, S. Eminoglu, H. Kulah, T. Akin, “Label-Free Detection of Leukemia Cells with a Lab-on-a-Chip System Integrating Dielectrophoresis and CMOS Imaging,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), pp. 1589-1592, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7181243
131) S. Eminoglu, M. Isikhan, N. Bayhan, M. A.
Gulden, O. S. Incedere, S. T. Soyer; S.Kocak, C. Yalcin, M. C. B. Ustundag, O.
Turan, U. Eksi, and T. Akin, “A
1280×1024-15μm CTIA ROIC for SWIR FPAs,” SPIE Defense and Security Symposium, Infrared Technology and
Applications XLI, SPIE 9451, p. 94510W, Baltimore, U.S.A, April 2015. 10.1117/12.2179537
130)
S. Eminoglu, M. A. Gulden, N. Bayhan, O. S. Incedere, M. Isikhan, S. T. Soyer,
C. Yalcin, C. M. B. Ustundag, S. Kocak, O. Turan, U. Eksi, and T. Akin, “A 640×480-17μm ROIC for Uncooled
Microbolometer FPAs,” SPIE Defense and
Security Symposium, Infrared Technology and Applications XLI, SPIE 9451, p.
94510Z, Baltimore, U.S.A, April 2015. 10.1117/12.2179538
129)
O. Bayraktar, E. Kobal, Y. Sevinc, C. Cetintepe, I. Comart, K. Demirel, E.
Sagiroglu Topalli, T. Akin, S.
Demir, and O. A. Civi, “RF MEMS Based Millimeter Wave Phased Array for Short
Range Communication,” European Conf. on Antennas and Propagation (EuCAP), pp.
1-5, Lisbon, Portugal, 13-17 May 2015.
128) M. M. Torunbalci, S. E. Alper,
and T. Akin, “Die Size Reduction by
Optimizing the Dimensions of the Vertical Feedthrough Pitch and Sealing Area in
the Advanced MEMS Process,” 2015 IEEE
Int'l Symposium on Inertial Sensors & Systems (ISISS 2015), pp. 1-4,
Hawaii, March 23-26, 2015.
127) T. Kose, Y. Terzioglu, K.
Azgin, and T. Akin, “A Single Mass
Two-Axis Capacitive MEMS Accelerometer with Force Rebalance,” 2015 IEEE Int'l Symposium on Inertial
Sensors & Systems (ISISS 2015), pp. 1-4, Hapuna Beach, HI, USA, March
23-26, 2015. 10.1109/ISISS.2015.7102371
126) M. M. Torunbalci, S. E. Alper,
and T. Akin, “A Novel Fabrication
and Wafer Level Hermetic Sealing Method for SOI-MEMS Devices using SOI Cap
Wafers,” The 28th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2015),
pp. 409-412, Estoril, Portugal, January 2015. 10.1109/MEMSYS.2015.7050976
125) E. C. Demir, M. M. Torunbalci,
I. Donmez, Y. E. Kalay, and T. Akin,
“Fabrication and Characterization of Gold-Tin Eutectic Bonding for Hermetic
Packaging of MEMS Devices,” The 16th
Electronics Packaging Technology Conference (EPTC 2014), pp. 241-245,
Marina Bay, Singapore, December 2014. 10.1109/EPTC.2014.7028329
124) M. M. Torunbalci, E. C. Demir,
I. Donmez, S. E. Alper, and T. Akin,
“Gold-Tin Eutectic Bonding for Hermetic Packaging of MEMS Devices with Vertical
Feedthroughs,” IEEE Sensors 2014,
Valencia, Spain, November 2014. 10.1109/ICSENS.2014.6985473
123) M. M. Torunbalci, S. E. Alper,
and T. Akin, “A Method of
Fabricating Vacuum Packages with Vertical Feedthroughs in a Wafer Level Anodic
Bonding Process,” Eurosensors XXVIII,
Brescia, Italy, September 2014. 10.1016/j.proeng.2014.11.297
122) Y. Terzioglu, S. E. Alper, K.
Azgin, and T. Akin, “A Capacitive
MEMS Accelerometer Readout with Concurrent Detection and Feedback using
Discrete Components,” IEEE/ION Position,
Location and Navigation Symposium (PLANS 2014), pp. 12-15, Monterey, CA,
USA, May 5-8, 2014. 10.1109/PLANS.2014.6851351
121) B. Kebapci, O. Dervisoglu, E.
Battal; A. K. Okyay, and T. Akin,
“Broadband Absorption Enhancement in an Uncooled Microbolometer Infrared
Detector,” SPIE Defense and Security
Symposium, Infrared Technology and Applications XL, SPIE Vol. 9070, p. 907021,
Baltimore,
U.S.A, May 2014. 10.1117/12.2069937
120) S. Eminoglu, M. A. Gulden, N.
Bayhan, O. S. Incedere, S. T. Soyer, C. M. B. Ustundag, M. Isikhan, S. Kocak,
O. Turan, C. Yalcin, and T. Akin,
“MT3825BA: A 384×288-25µm ROIC for Uncooled Microbolometer FPAs,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XL, SPIE Vol. 9070, p. 907024, Baltimore,
U.S.A, May 2014. 10.1117/12.2057510
119) M. Tepegoz, A. Kucukkomurler,
F. Tankut, S. Eminoglu, and T. Akin,
“A Miniature Low-Cost LWIR Camera with a 160×120 Microbolometer FPA,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XL, SPIE Vol. 9070, p. 90701O, Baltimore,
U.S.A, May 2014. 10.1117/12.2057508
118) M. M. Torunbalci, S. E. Alper,
and T. Akin, “Wafer Level Hermetic
Encapsulation of MEMS Inertial Sensors using SOI Cap Wafers with Vertical
Feedthroughs,” IEEE Int. Symposium on Inertial Sensors and Systems (ISISS’14),
pp. 1-2, Laguna Beach, California, USA, February 2014. 10.1109/ISISS.2014.6782539
117) S. Sonmezoglu, H. D. Gavcar, K.
Azgin, S. E. Alper, and T. Akin, “Simultaneous
Detection of Linear and Coriolis Accelerations on a Mode-Matched MEMS
Gyroscope,” The 27th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2014),
pp. 32-35, San Francisco, U.S.A., January 2014. 10.1109/MEMSYS.2014.6765566
116) S. Tez and T. Akin, “Fabrication of a
Sandwich Type Three Axis Capacitive MEMS Accelerometer,” IEEE Sensors Conference, pp. 1-4, Baltimore, USA, November 2013. 10.1109/ICSENS.2013.6688598
115) E. Topalli, C.
Cetintepe, O. Aydin-Civi, S. Demir, and T.
Akin, “A Fabrication Process Flow for Stacked Structural Layer Formation
Using Au-Au Thermocompression Bonding for RF MEMS Capacitive Switches”, 14th
Int. Symposium on RF-MEMS and RF-Microsystems, Potsdam, Germany, July 1-3,
2013.
114) S. Sonmezoglu, S. E.
Alper, and T. Akin, “A High
Performance Automatic Mode Matched MEMS Gyroscope with an Improved Thermal
Stability of the Scale Factor,” The 17th
International Conference on Solid-State Sensors, Actuators and Microsystems
(TRANSDUCERS 2013), pp.2519-2522, Barcelona, Spain, 16-20 June 2013. 10.1109/Transducers.2013.6627318
113) O. Erturk, E. Battal,
S. E. Kucuk, A. K. Okyay, and T. Akin,
“A Plasmonically Enhanced Pixel Structure for Uncooled Microbolometer
Detectors,” SPIE Defense and Security
Symposium, Infrared Technology and Applications XXXIX, SPIE Vol. 8704, Baltimore, U.S.A, April 2013. 10.1117/12.2019540
112) S. Eminoglu and T. Akin, “MT3250BA: A 320×256-50µm
Snapshot Microbolometer ROIC for High-Resistance Detector Arrays,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XXXIX, SPIE Vol. 8704, Baltimore, U.S.A, April 2013. 10.1117/12.2019525
111) S. Eminoglu, M.
Isikhan, N. Bayhan, M. A. Gulden, O. S. Incedere, S. T. Soyer, S. Kocak, G. S.
Yilmaz, and T. Akin, “MT6415CA: A
640×512-15µm CTIA ROIC for SWIR InGaAs Detector Arrays,” SPIE Defense and Security Symposium, Infrared Technology and
Applications XXXIX, SPIE Vol. 8704, Baltimore,
U.S.A, April 2013. 10.1117/12.2019519
110) J. Musayev, Y.
Adiguzel, H. Kulah, S. Eminoglu, T. Akin,
“Cell Detection using a CMOS Image Sensor with Modified Pixel Structure
Suitable for Bio-Chemical Surface Activation,” The 26th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS 2013), pp. 941-944, Taipei, Taiwan, January 2013. 10.1109/MEMSYS.2013.6474400
109) O. Aydin and T. Akin, “A Bulk-Micromachined
Fully-Differential MEMS Accelerometer with Interdigitated Fingers,” The 11th Annual IEEE Conference on Sensors
(SENSORS-12), Taipei, Taiwan,
October 28-31, 2012. 10.1109/ICSENS.2012.6411038
108) S. Keskin, A. Aydemir,
and T. Akin, “Veils-Free DRY (ICP)
Etching of Gold Films with a Vertical Sharp Sidewall,” The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12),
Ilmenau, Germany, September 9-12, 2012.
107) S. Tez and T. Akin,
“Comparison of Two Alternative Fabrication Processes for a Three-Axis
Capacitive MEMS Accelerometer” The 26th
European Conference on Solid -State Transducers (Eurosensors 2012), Krakow,
Poland, September 09-12, 2012. 10.1016/j.proeng.2012.09.153
106) I. Comart, C.
Cetintepe, S. Demir, and T. Akin,
"A 35 GHz High Isolation RF MEMS SPDT Switch," The 13th International. Symposium on RF MEMS and RF
Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July 2012.
105) C. Cetintepe, K.
Demirel, S. Demir, and T. Akin,
"A 5-Bit DMTL Phase Shifter with Analog Tuning Capabilities," The 13th International. Symposium
on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July
2012.
104) K. K. Tokgoz, S.
Demir, and T. Akin, "Surface
Micromachining Implementation of S-Band 4-bit Phase Shifter," The 13th International. Symposium
on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July
2012.
103) O. Kilic, I. Comart,
S. Demir, and T. Akin, "3-bit
CPW Phase Shifter Implemented by a Reduced Branch Line Coupler," The 13th International. Symposium
on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July
2012.
102) M. Tepegoz, A. Oguz,
A. Toprak, S. U. Senveli, E. Canga, M. Y. Tanrikulu, and T. Akin, “An Uncooled Microbolometer Focal Plane Array Using
Heating Based Resistance Nonuniformity Compensation,” SPIE Defense and Security Symposium, Infrared Technology and
Applications XXXVIII, SPIE Vol. 8353, pp. 83531E-1-4, Baltimore, U.S.A, April 2012. 10.1117/12.964525
101) S. Z. Lulec, S. E. Kucuk,
E. Battal, A. K. Okyay, M. Y. Tanrikulu, and T. Akin, “An Analysis for the Broad-Band Absorption Enhancement
Using Plasmonic Structures on Uncooled Infrared Detector Pixels,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XXXVIII, SPIE Vol. 8353, pp.
83531D-1-4, Baltimore, U.S.A, April
2012. 10.1117/12.964549
100) S. Keskin and T. Akin, “The First Fabricated Dual-Band
Uncooled Infrared Microbolometer Detector with a Tunable Micro-Mirror
Structure,” SPIE Defense and Security
Symposium, Infrared Technology and Applications XXXVIII, SPIE Vol. 8353,
pp. 83531C-1-4, Baltimore, U.S.A, April
2012. 10.1117/12.964551
99) S. Eminoglu, Y.
U. Mahsereci, C. Altiner, and T. Akin,
“MT6425CA: a 640 × 512 - 25µm CTIA ROIC for SWIR InGaAs Detector Arrays,” SPIE Defense and Security Symposium, Infrared Technology and Applications
XXXVIII, SPIE Vol.
8353, pp. 83530D-1-4, Baltimore,
U.S.A, April 2012. 10.1117/12.964548
98) S. Sonmezoglu, S. E.
Alper, and T. Akin, “An
Automatically Mode-Matched MEMS Gyroscope with 50 Hz Bandwidth,” The 25th IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2012), pp. 523-526,
Paris, France, Jan. 29-Feb.2, 2012. 10.1109/MEMSYS.2012.6170231
97) E. Tatar, M. M.
Torunbalci, S. E. Alper, and T. Akin,
“A Method and Electrical Model for the Anodic Bonding of SOI and Glass Wafers,”
The 25th IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2012), pp. 68-71,
Paris, France, Jan. 29-Feb.2, 2012. 10.1109/MEMSYS.2012.6170095
96) B. Eminoglu, S. E.
Alper, and T. Akin, “A New Baseband
Equivalent Model for Sense Mode Dynamics and its Effects on Force-Feedback
Controller Design for MEMS Gyroscopes,” The
10th Annual IEEE Conference on Sensors (SENSORS-11), Limerick, Ireland,
October 28-31, 2011. 10.1109/ICSENS.2011.6127222
95) M. M. Torunbalci,
E. Tatar, S. E. Alper, and T. Akin,
“Comparison of Two Alternative Silicon-on-Glass Microfabrication Processes for
MEMS Inertial Sensors,” Eurosensors XXV,
Athens, Greece, September 2011. 10.1016/j.proeng.2011.12.221
94) B. Eminoglu, S. E.
Alper, and T. Akin, “An Optimized
Analog Drive-Mode Controller for Vibratory MEMS Gyroscopes,” Eurosensors XXV, Athens, Greece,
September 2011. 10.1016/j.proeng.2011.12.323
93) O. Aydin-Civi, S.
Demir, T. Akin, “Reconfigurable
Antennas Using RF-MEMS research in Turkey”, 2011
IEEE MTT-S International Microwave Symposium, Digest, pp.1-4, June 2011. 10.1109/MWSYM.2011.5973201
92) A. Aydemir and T. Akin, “Prevention of Sidewall
Redeposition of Etched Byproducts in Dry Au Etch Process,” The 22nd
Micromechanics and Micro Systems Europe Workshop, (MME’11), Toensberg,
Norway, June 19-22, 2011. 10.1088/0960-1317/22/7/074004
91) B. Eminoglu, S. E.
Alper, and T. Akin, “A Novel,
Simple, and Q-Independent Self Oscillation Loop Design for Vibratory MEMS
Gyroscopes,” The 16th International
Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11),
pp. 1440-1443, Beijing, China, June 5-9, 2011. 10.1109/TRANSDUCERS.2011.5969590
90) U.
Sonmez, H. Kulah, and T. Akin, “A
Fourth Order Unconstrained ΣΔ Capacitive Accelerometer,” The 16th International Conference on
Solid-State Sensors, Actuators and Microsystems (Transducers’11), pp.
707-710, Beijing, China, June 5-9, 2011. 10.1109/TRANSDUCERS.2011.5969214
89) E.
Sahin, S. E. Alper, and T. Akin,
“Experimental Evaluation of Alternative Drive-Mode Control Electronics
Developed for High-Performance MEMS Gyroscopes,” The 16th International Conference on Solid-State Sensors, Actuators and
Microsystems (Transducers’11), pp. 2817-2820, Beijing, China, June 5-9,
2011. 10.1109/TRANSDUCERS.2011.5969566
88) S. E. Kucuk, M. Y. Tanrikulu,
and T. Akin, “A Detailed Analysis
for the Absorption Coefficient of Multilevel Uncooled Infrared Detectors,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XXXVII, SPIE Vol. 8012, pp.
80121R/1-8, Orlando, U.S.A, April
2011. 10.1117/12.890236
87) A. Toprak, M. Tepegoz, and T. Akin, “A Two-Stage Digital-to-Analog
Converter for Bias Correction in Uncooled Microbolometer Arrays,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XXXVII, SPIE Vol. 8012, pp.
80121S/1-6, Orlando, U.S.A, April
2011. 10.1117/12.890235
86) S. U.
Senveli, M. Y. Tanrikulu, and T. Akin,
“A Thermal Conductance Optimization and Measurement Approach for Uncooled
Microbolometers,” SPIE Defense and
Security Symposium, Infrared Technology and Applications XXXVII, SPIE Vol.
8012, pp. 80121T/1-10, Orlando, U.S.A,
April 2011. 10.1117/12.890234
85) K. Azgin, C. Ro, A.
Torrents, T. Akin, and L. Valdevit,
“A Resonant Tuning Fork Force Sensor with Unprecedented Combination Of
Resolution and Range,” The 24th
IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
pp. 545-548, Cancun, Mexico, January 2011. 10.1109/MEMSYS.2011.5734482
84) E. Tatar, S. E. Alper,
and T. Akin, “Effect of Quadrature
Error on the Performance of a Fully-Decoupled MEMS Gyroscope,” The 24th IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2011), pp. 569-572,
Cancun, Mexico, January 2011. 10.1109/MEMSYS.2011.5734488
83) C. Guclu, C. Cetintepe,
O. Aydin-Civi, S. Demir, and T.
Akin, “35 GHz Phased Array Antenna using DMTL Phase Shifters,” 10th Mediterranean Microwave Symposium
(MMS2010), METU-NCC, pp.114-117, 25-27 August, 2010. 10.1109/MMW.2010.5605151
82) O. Bayraktar, O.
Aydın-Civi, and T. Akin, “Beam
Switching Reflectarray with MEMS Controls,” European Conference on Antennas
& Propagation, Spain, April, 2010.
81) C. E. Cansoy, H. Y.
Erbil, O. Akar, and T. Akin,
“Investigation of Contact Angle Behavior on Superhydrophobic Patterned
Surfaces,” 13th European Conference on
Applications of Surface and Interface Analysis, October 18-23, 2009
Antalya, Turkey.
80) E. Ekmekci, K. Topalli,
T. Akin, and G. Turhan-Sayan
“Effects of Array Dimensions on the Resonance Characteristics of SRR Type
Metamaterial Arrays with Small Sizes: Simulations and Experiments,” Progress in
Electromagnetics Research Symposium (PIERS 2009 Moscow), pp. 83-86, Moscow,
Russia, August 2009. https://www.researchgate.net/publication/266417802
79) S. E. Alper, A.
Aydemir, and T. Akin,
“Stepped-Etching for Preserving Critical Dimensions in Through-Wafer Deep
Reactive Ion Etching of Thick Silicon,” The
15th International Conference on Solid-State Sensors, Actuators and
Microsystems (Transducers’09), pp. 1110-1113, Denver, June 2009. 10.1109/SENSOR.2009.5285924
78) E. Ekmekci, K. Topalli,
T. Akin, and G. Turhan-Sayan, “A
Feasibility Study for Tunable Metamaterial Design Using Multi-Split SRR
Structures and RF MEMS Switching,” IEEE Antennas and Propagation Society
International Symposium/USNC/URSI National Radio Science Meeting,
South-Carolina, U.S.A. pp. 1548-1551,
June 2009. 10.1109/APS.2009.5171933
77) A. Oguz, M. Tepegoz,
and T. Akin, “A Bias Heating
Cancellation Method for Resistive Uncooled Microbolometer Detectors,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXV, SPIE Vol. 7298, pp. 72982G/1-8, Orlando,
U.S.A, April 2009. 10.1117/12.823720
76) A. Toprak, M. Tepegoz,
and T. Akin, “A Column-Based
Two-Stage Analog-to-Digital Converter for Uncooled Microbolometer Arrays,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXV, SPIE Vol. 7298, pp. 72982H/1-8, Orlando,
U.S.A, April 2009. 10.1117/12.823721
75) E. Ekmekci, K. Topalli,
T. Akin, and G. Turhan-Sayan,
“Experimental Investigation of Metamaterial Array Structures with Split Ring
Resonators,” IEEE 17th Signal Processing and Communications Applications Conf.,
Antalya, TURKEY, pp. 551-554, April 2009. 10.1109/SIU.2009.5136394
74) S. E. Alper, K. Sahin,
and T. Akin, “An Anaysis to Improve
Stability of Drive-Mode Oscillations in Capacitive Vibratory MEMS Gyroscopes,” The 22nd IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2009), pp. 817-820,
Sorrento, Italy, Jan. 2009. 10.1109/MEMSYS.2009.4805508
73) B. Boğa, I. E.
Ocak, H. Külah, and T. Akin,
“Modeling of a Capacitive ∑-∆ MEMS Accelerometer System including
the Noise Components and Verification with Test Results,” The 22th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS 2009), pp. 821-824, Sorrento, Italy, Jan. 2009. 10.1109/MEMSYS.2009.4805509
72) K.Sahin, E. Sahin, S.
E. Alper, and T. Akin, “A
Wide-Bandwidth and High-Sensitivity Robust Microgyroscope,” 19th
MicroMechanics Europe Workshop (MME 2008), pp. 97-100, Aachen, Germany,
September 28-30, 2008. 10.1088/0960-1317/19/7/074004
71) R.
Kepenek, I.E. Ocak , H. Kulah, and T.
Akin, “A micro-g Resolution Microaccelerometer System with a Second-Order
Sigma-Delta Readout Circuitry”, Conf. on PhD Research in Microelectronics and
Electronics, pp. 41-44, Istanbul, Turkey, Jun 22-25, 2008. 10.1109/RME.2008.4595720
70) K.
Topalli, O. Bayraktar, M. Unlu, O. Aydin Civi, S. Demir, and T. Akin, “Reconfigurable Antennas by RF
MEMS Technology,” 30th ESA Antenna Workshop on Antennas for Earth
Observation, Science, Telecommunications and Navigation Space Missions,
pp.497-500, Noordwijk, The Netherlands, 27-30 May 2008.
69) M. Tepegoz, F. Civitci,
and T. Akin, “An Optimum Reference
Detector Design for Uncooled Microbolometer FPAs,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIV, SPIE Vol. 6940, pp. 694028/1-8, March
2008. 10.1117/12.786611
68)
M. Y. Tanrikulu, F. Civitci, and T. Akin,
“A New Method to Estimate the
Absorption Coefficient for Uncooled Infrared Detectors,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIV, SPIE Vol. 6940, pp. 694027/1-7, March
2008. 10.1117/12.786610
67)
M. Tepegoz, A. Toprak, and T. Akin,
“A Low Power Readout Circuit Approach for Uncooled Resistive Microbolometer
FPAs,” SPIE Defense and Security
Symposium, Infrared Technology and
Applications XXXIV, SPIE
Vol. 6940, pp. 694026/1-8, March 2008. 10.1117/12.786609
66) K. Topalli, M. Unlu, I.
Istanbulluoglu, H. I. Atasoy, O. Bayraktar, O. Aydin Civi, Ş. Demir, S.
Koc, and T. Akin, “Reconfigurable RF
MEMS Devices and Antennas,” 5th International Conference on Electrical and
Electronics Engineering (ELECO 2007), pp.204-209, Bursa, Turkey, 5-9 December
2007.
65) K.
Azgin, Y. Temiz, and T. Akin, “A
Novel In-Operation High g-Survavible MEMS Gyroscope,” Accepted, The 6th Annual IEEE Conference on
Sensors (SENSORS-07), Atlanta, Georgia, USA, October 28-31, 2007.
10.1109/ICSENS.2007.4388348
64) M.Unlu, H. I. Atasoy, S. Demir, O. Aydin
Civi, S. Koc, and T. Akin,
"Double Stub and Triple Stub RF MEMS Impedance Tuners," Proceedings
of 8th International Symposium on RF MEMS and RF Microsystems,
MEMSWAVE, Barcelona, Spain, pp.169-172, 26-29 June 2007.
63) K. Topalli, O. Aydin Civi, S. Demir, S.
Koc, and T. Akin,
"Monolithically Integrated MEMS Phased Array,", Proceedings of 8th
International Symposium on RF MEMS and RF Microsystems, MEMSWAVE, Barcelona,
Spain, pp.119-122, 26-29 June 2007.
62) K.
Topalli, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, “Dual-Frequency Reconfigurable Slot Dipole Array with a
CPW-Based Feed Network using RF MEMS Technology for X- and Ku-Band
Applications,” 2007 IEEE AP-S International Symposium, pp. 825-828, Honolulu,
Hawaii, USA, 10-15 June 2007.
61) M. Tepegoz and T. Akin, “Resistance Non-Uniformity
Correction Method Using Bias Heating for Resistive Uncooled Microbolometer
FPAs,” SPIE Defense and Security
Symposium, Infrared
Technology and Applications
XXXIII, SPIE Vol. 6542, pp.
3T1-8, April 2007. 10.1117/12.726570
60) K. Azgin, Y. Temiz, and
T. Akin, “An SOI-MEMS Tuning Fork
Gyroscope with Linearly Coupled Drive Mechanism,” The 20th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS 2007), pp. 607-610, Kobe, Japan, January 21-25,
2007. 10.1109/MEMSYS.2007.4433080
59) O. Bayraktar, K.
Topalli, M. Unlu, O. Aydin Civi, S. Demir, and T. Akin, “Beam Switching Reflectarray using RF MEMS Technology,”
European Conference on Antennas and Propagation, Edinburgh, UK, 11-16 November
2006. 10.1049/ic.2007.1341
58) O. Bayraktar, K.
Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, H. I. Atasoy, O. A. Civi,
S. Demir, S. Koc, T. Akin,
“Reconfigurable Reflectarray using RF MEMS Technology,” European Conference on Antennas and Propagation, Nice, France, 6-10
November 2006. 10.1109/EUCAP.2006.4584967
57) E. Erdil, K. Topalli,
M. Unlu, I. Istanbulluoglu, E. U. Temocin, H. I. Atasoy, O. Bayraktar, O. A.
Civi, S. Demir, S. Koc, T. Akin,
“Reconfigurable Slot Antenna with Fixed-fixed Beam Type RF MEMS Capacitors,” European Conference on Antennas and
Propagation, Nice, France, 6-10 November 2006. 10.1109/EUCAP.2006.4584979
56) T. Akin and H. Kulah, “MEMS and Microsystem Technologies for
Microsensors and Biological Microdevices,” The
7th Workshop on Biosensors and Bioanalytical u-Techniques in Environmental and
Clinical Analysis, Kusadasi, Turkey, September 2006.
55) S. E. Alper, K. M.
Silay, and T. Akin, “Tactical-Grade
Silicon-on-Glass Gyroscope with Very-Small Quadrature Coupling,” The 19th
European Conf. on Solid-State Transducers (Eurosensors XIX), Göteborg,
Sweden,
54) K. Topalli, M. Unlu, O.
Aydin Civi, S. Demir, S. Koc, and T. Akin, “A Monolithic Phased Array
using 3-Bit RF MEMS Phase Shifters,” 2006 IEEE AP-S International Symposium
and USNC/URSI National Radio Science Meeting, Albuquerque, New Mexico, USA,
pp. 517-520, July 2006. 10.1109/TMTT.2007.914377
53) M. Unlu, K. Topalli, H.
I. Atasoy, E. U. Temocin, I. Istanbulluoglu, O. Bayraktar, S. Demir, O. A.
Civi, S. Koc, and T. Akin, “A
Reconfigurable RF MEMS Triple Stub Impedance Matching Network,” European Microwave Conference 2006,
Manchester, United Kingdom, pp. 1370-1373, 10-15 September 2006. 10.1109/EUMC.2006.281272
52) H. I. Atasoy, K.
Topalli, M. Unlu, I. Istanbulluoglu, O. Bayraktar, E. U. Temocin, S. Demir, O.
A. Civi, S. Koc, and T. Akin,
“Investigation of On-Wafer TRL Calibration Accuracy Dependence on Transitions
and Probe Positioning,” European
Microwave Conference 2006, Manchester, United Kingdom, pp. 1582-1585, 10-15
September 2006. 10.1109/EUMC.2006.281401
51) H. I. Atasoy, K.
Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, O. Bayraktar, S. Demir, O.
Aydin-Civi, S.Koc, and T.Akin,
“Metal-to-metal and capacitive contact RF MEMS shunt switch structures,” 7th
Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp.
154-156, Orvieto, Italy, 27-30 June 2006.
50) M. Unlu, K. Topalli, H.
I. Atasoy, E. U. Temocin, I. Istanbulluoglu, O. Bayraktar, S. Demir, O.
Aydin-Civi, S. Koc, and T. Akin, “A
Reconfigurable RF MEMS Impedance Tuner for Impedance Matching of a Two-Stage
Low Noise Amplifier,” 7th Workshop on MEMS for
MilimeterWave Communications (MEMSWAVE), pp. 115-118, Orvieto, Italy,
27-30 June 2006.
49) O. O. Yildirim and T. Akin, “Dynamic resistance nonuniformity compensation circuit for
uncooled microbolometer detector arrays,” Defense
and Security Symposium, 2006, Orlando (Kissimmee), Florida, United States,
Proceedings Volume 6206, Infrared Technology and Applications XXXII;
62061T, May 2006. 10.1117/12.665650
48) S. E. Alper, I. E.
Ocak, and T. Akin, “Ultra-Thick and
High-Aspect-Ratio Nickel Microgyroscope Using EFAB TM Multi-Layer Additive
Electroforming,” The 19th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2006),
pp. 670-673, Istanbul, Turkey, January 22-26, 2006. 10.1109/MEMSYS.2006.1627888
47) S. E. Alper, K. Azgin,
and T. Akin, “High-Performance
SOI-MEMS Gyroscope with Decoupled Oscillation Modes,” The 19th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS 2006), pp. 70-73, Istanbul, Turkey,
46) S. E. Alper, K. M.
Silay, and T. Akin, “A Low-Cost
Rate-Grade Nickel Microgyroscope,” The 19th European Conf. on Solid-State
Transducers (Eurosensors XIX), Barcelona, Spain,
45) S. Onat, M. Unlu, L.
Alatan, S. Demir, and T. Akin,
“Design of a re-configurable dual frequency microstrip antenna with integrated
RF MEMS switches,” IEEE Antennas and
Propagation Society International Symposium, Volume: 2A, pp 384- 387, 3-8
July 2005. 10.1109/APS.2005.1551823
44) E. Erdil, K. Topalli,
O. Aydin Civi, and T. Akin,
“Reconfigurable CPW-Fed Dual-Frequency Rectangular Slot Antenna Using RF MEMS
Technology,” 2005 AP-S International
Symposium and USNC/URSI National Radio Science Meeting, Vol. 2A, pp. 392-395,
Washington, DC, 3-8 July 2005. 10.1109/APS.2005.1551825
43) E. Erdil, S. Onat, K.
Topalli, I. Istanbulluoglu, M. Unlu, S. Demir, L. Alatan, O. Aydin Civi, S.
Koc, and T. Akin, “Reconfigurable Antenna
Structures Using MEMS Technology,” 6th
Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. 35-38,
Switzerland, 23-24 June 2005.
42) M. Unlu, K. Topalli, S.
Demir, O. Aydin Civi, S. Koc, and T.
Akin, “A Parametric Study On Modeling Distributed Mems Transmission
Lines”, 34th European Microwave Conference, pp.1157-1160, Amsterdam, The Netherlands, October 11‑15,
2004.
41) M. Unlu, K. Topalli, S.
Demir, O. Aydin Civi, S. Koc, and T.
Akin, “Design and Modeling of a Reconfigurable Triple Stub Impedance
Matching Network using Distributed MEMS Transmission Lines,” 5th Workshop on MEMS for MilimeterWave
Communications (MEMSWAVE), pp. I17-I20, Uppsala, Sweden, 30 June-2 July
2004.
40) K. Topalli, M. Unlu, S.
Demir, O. Aydin Civi, S. Koc, and T. Akin,
“A Parametric Modeling Study on Distributed MEMS Transmission Lines,” 5th Workshop on MEMS for MilimeterWave
Communications (MEMSWAVE), pp. I13-I16 Uppsala, Sweden, 30 June-2 July
2004.
39) K. Topalli, M. Unlu, H. Sagkol, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A New Model for Distributed
MEMS Transmission Lines,” 2004 AP-S
International Symposium and USNC/URSI National Radio Science Meeting, pp.
2855-2858, Monterey, California, 20-26 June 2004. 10.1109/APS.2004.1331972
38) B. Okcan and T. Akin, “A Thermal
Conductivity Based Humidity Sensor in a Standard CMOS Process,” The 17th IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2004), pp. 552-555,
Maastricht, The Netherlands,
37) S.E. Alper and T. Akin, “A Symmetrical and Decoupled
Nickel Microgyroscope on Insulating Substrate,” The 17th
European Conf. on Solid-State Transducers (Eurosensors XVII), pp. 24-27, Guimaraes, Portugal,
September 21-24, 2003. 10.1016/j.sna.2004.04.041
36) M. Tepegoz and T. Akin, “A Redout Circuit for QWIP
Infrared Detector Arrays using Current Mirroring Integration,” European Solid-State Circuits Conference
(ESSCIRC 2003), pp. 133-136, Estoril, Portugal,
September 16-18, 2003. 10.1109/ESSCIRC.2003.1257090
35) D. Harris and T. Akin, “A Cross-Cultural VLSI Design
Project,” The American
Society for Engineering Education (ASEE) 2003 Annual Conference, Nashville,
Tennessee,
34) S. Eminoglu, M.Y.
Tanrikulu, and T. Akin, “A Low-Cost
64x64 Uncooled Infrared Detector Arrays in Standard CMOS,” The
12th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03,
Eurosensors XV), pp. 316-319, Boston, Massachusetts, June 8-12, 2003. 10.1109/SENSOR.2003.1215316
33) S.E. Alper and T. Akin, “A Single-Crystal Silicon
Symmetrical and Decoupled Gyroscope on Insulating Substrate,” The 12th Int.
Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03, Eurosensors XV),
pp. 1399-1402, Boston, Massachusetts, June 8-12, 2003. 10.1109/sensor.2003.1217036
32) S. Eminoglu, M.Y. Tanrikulu,
and T. Akin, “Low-Cost Uncooled
Infrared Detector Arrays in Standard CMOS,” SPIE
AeroSense Symposium, Infrared Technology and Applications XXIX (Aerosense 2003),
SPIE Vol. 5074, pp. 425-436, Orlando, Florida, April 21-25, 2003. 10.1117/12.488185
31) B. Koç, D. Basaran, T. Akin, and A. Erden, “Design of a
Piezoelectric Ultrasonic Motor for Micro-Robotic Application,” Int. Conf. Mechatronic Design and Modeling,
pp. 205-219, Ürgüp, Turkey, Sept. 2002.
30) S. Eminoglu, D.
Sabuncuoglu Tezcan, M.Y. Tanrikulu, and T. Akin, "Low-Cost Uncooled
Infrared Detectors in CMOS Process," The 16th European Conf. on
Solid-State Transducers (Eurosensors XVI), pp. 480-483, Prague, Czech Republic, September 15-18, 2002. 10.1016/j.sna.2003.08.013
29) S.E. Alper and T.
Akin, "A Symmetrical and Decoupled Microgyroscope with Electroforming
Process on Insulating Substrate," The 16th European Conf. on
Solid-State Transducers (Eurosensors XVI), pp. 814-817, Prague, Czech Republic, September 15-18, 2002.
28) M. Ünlü, K. Topalli, H.
Sagkol, S. Demir, Ö. Aydin Çivi, S. Koç, and T. Akin, "New
MEMS Swich Structures for Antenna Applications," 2002 IEEE AP-S
International Symposium and USNC/URSI National Radio Science Meeting,
p.134, San Antonio, Texas, 16-21 June 2002.
27) M. Ünlü, K. Topalli, H.
Sagkol, S. Demir, Ö. Aydin Çivi, S. Koç, and T. Akin, "RF
MEMS Adjustable Impedance Matching Network and Adjustable Power Divider," 2002
IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting,
pp. 26-29, San Antonio, Texas, 16-21 June 2002. 10.1109/APS.2002.1016020
26) H. Sagkol, K. Topalli,
M. Ünlü, Ö. Aydin Çivi, S. Koç, S. Demir, and T. Akin, "A
Monolithic Phased Array with RF MEMS Technology," 2002 IEEE AP-S
International Symposium and USNC/URSI National Radio Science Meeting, pp.
760-763, San Antonio, Texas, 16-21 June 2002. 10.1109/APS.2002.1017094
25) S.E. Alper and T.
Akin, "Optimum Designs For High-Performance Micromachined
Gyroscopes," NATO RTO Sensors & Electronics Technology (RTO-SET)
Panel: Symposium on Emerging Military Capabilities Enabled by Advances in
Navigation Sensors, Istanbul, 14-16 October 2002.
24) S. Eminoglu, M.Y.
Tanrikulu, D. Sabuncuoglu Tezcan, and T. Akin, "A Low-Cost, Small
Pixel Uncooled Infrared Detector for Large Focal Plane Arrays using a Standard
CMOS Process," SPIE AeroSense Symposium, Infrared Technology and
Applications XXVIII (Aerosense 2002), SPIE Vol. 4721, pp. 111-121, Orlando,
Florida, April 1-5, 2002. 10.1117/12.478839
23) S.E. Alper and T.
Akin, "A Symmetric Surface Micromachined Gyroscope with Decoupled
Oscillation Modes," The 11th Int. Conf. on Solid-State Sensors and
Actuators (TRANSDUCERS'01, Eurosensors XV), pp. 456-459, Munich, Germany,
22) S. Eminoglu, D.S.
Tezcan, and T. Akin, "CMOS N-Well Microbolometer FPA with
Temperature Coefficient Enhancement Circuitry," SPIE AeroSense
Symposium, Infrared Technology and Applications XXVII (Aerosense 2001),
SPIE Vol. 4369, pp. 240-249, Orlando, Florida, April 16-20, 2001. 10.1117/12.445292
21) D.S. Tezcan, S.
Eminoglu, O. S. Akar, and T. Akin, "An Uncooled Microbolometer
Infrared Focal Plane Array in Standard CMOS," Photodetector Materials
and Devices VI (Opto-electronics 2001), SPIE Vol. 4288, January 20-26,
2001. 10.1117/12.429399
20) D.S. Tezcan, S.
Eminoglu, O. S. Akar, and T. Akin, "A Low Cost Uncooled Infrared
Microbolometer Focal Plane Array Using the CMOS N-Well Layer," The 14th
IEEE Int. MicroElectroMechanical Systems Conf. (MEMS 2001), pp. 566-569,
Interlaken, Switzerland, January 21-25, 2001. 10.1109/MEMSYS.2001.906604
19) S.S. Akbay, A. Bircan,
and T. Akin, "A CMOS Visible Image Sensor Array Using Current
Mirroring Integration Readout Circuitry," The 14th European Conf. on
Solid-State Transducers (Eurosensors XIV), pp. 21-24, Copenhagen, Denmark,
August 27-30, 2000. paper19.pdf
18) S.E. Alper and T.
Akin, "A Planar Gyroscope Using a Standard Surface Micromachining
Process," The 14th European Conf. on Solid-State Transducers
(Eurosensors XIV), pp. 387-390, Copenhagen, Denmark, August 27-30, 2000. paper18.pdf
17) O. Akar, T. Akin,
T. Harpster, and K. Najafi, "A Wireless Batch Sealed Absolute Capacitive
Pressure Sensor," The 14th European Conf. on Solid-State Transducers
(Eurosensors XIV), pp. 585-588, Copenhagen, Denmark, August 27-30, 2000. 10.1016/S0924-4247(01)00753-1
16) H. Kulah and T. Akin,
"A High Performance Readout Circuit for Infrared Focal Plane Array Applications,"
Invited to Design Automation Conference 2000, Los Angeles, California,
June 2000.
15) D.S. Tezcan, F. Kocer,
and T. Akin, "An Uncooled Microbolometer Infrared Detector in any
Standard CMOS Technology," The 10th Int. Conf. on Solid-State Sensors
and Actuators (TRANSDUCERS'99), pp. 610-613, Sendai, Japan,
14) A. Tezel and T. Akin,
"A Low Power Switched-Current Algorithmic A/D Converter," IEEE
Int. Sym. on Circuits and Systems, Vol. I, pp. 282-285, Orlando, Florida,
June 1999. 10.1109/ISCAS.1999.777858
13) H. Kulah and T. Akin,
"An Infrared FPA Readout Circuit Based on Current Mirroring
Integration," SPIE AeroSense Symposium, Infrared Technology and
Applications XXV, SPIE Vol. 3698, pp. 778-788, Orlando, Florida, April
1999. 10.1117/12.354578
12) S. Eminoglu and T.
Akin, "A CAD Environment for Digital Filters using A VerilogHDL Based
Functional Bit-Serial Compiler," 10th Int. Conf. on Microelectronics,
Monastir, pp. 91-94, Tunisia, December 1998. 10.1109/ICM.1998.825576
11) H. Kulah and T. Akin,
"A CMOS Current Mirroring Integration Readout Structure for Infrared Focal
Plane Arrays," European Solid-State Circuits Conference, pp.
468-471, The Hague, The Netherlands, September 1998. 10.1109/esscir.1998.186310
10) Z. Olgun, O. Akar, H. Kulah, and T. Akin, "An Integrated Thermopile Structure with High Responsivity and Detectivity in Any Standard CMOS Technology," Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'97), pp. 1263-1266, Chicago, June 1997. 10.1016/S0924-4247(98)00038-7
9) T. Akin, B.
Ziaie, and K. Najafi, "A Modular Micromachined High-Density Connector for
Implantable Biomedical Systems," IEEE Micro-Electro-Mechanical-Systems
Workshop (MEMS-96), pp. 497-502, San Diego, California, February 1996. 10.1109/MEMSYS.1996.494032
8) R. M. Bradley, T.
Akin, S. Gurkan, X. Cao, and K. Najafi, "Chronic Recordings from
Fibers of Rat Glossopharyngeal Nerve Regenerated Through a Micromachined Sieve
Electrode Array,"” AChemS XVII (Ass. for Chemoreception Sciences),
Sarasota, Florida, April, 1995.
7) T. Akin, K.
Najafi, and R. M. Bradley, "An Implantable Multichannel Digital Neural
Recording System for a Micromachined Sieve Electrode," Digest, Int.
Conf. on Solid-State Sensors and Actuators (TRANSDUCERS’95-EUROSENSORS’IX),
pp. 51-54, Stockholm, June 1995. 10.1109/SENSOR.1995.717081
6) R. M. Bradley, T.
Akin, S. Gurkan, and K. Najafi, "Long Term Recordings from a
Micromachined Sieve Electrode Implanted in the Rat Glossopharyngeal
Nerve," Digest, Society for Neuroscience, Nov., 1994.
5) T. Akin,
"Silicon Micromachining and Microfabrication Techniques for Integrated
Sensor and Actuator Systems," IEEE Mediterranean Electrotechnical
Conference (MELECON'94), pp. 529-532, Antalya, Turkey, April, 1994. 10.1109/MELCON.1994.381038
4) T. Akin and K.
Najafi, "A telemetricly Powered and Controlled Implantable Neural
Recording System with CMOS Interface Circuitry and Micromachined Silicon Sieve
Electrode," IEEE Mediterranean Electrotechnical Conference (MELECON'94),
pp. 545-548, Antalya, Turkey, April, 1994. 10.1109/MELCON.1994.381035
3) R. M. Bradley, R. Smoke,
T. Akin, and K. Najafi, "Functional Regeneration of
Glossopharyngeal Nerve Through Micromachined Sieve Electrodes," AChemS XIV
(Ass. for Chemoreception Sciences), April, 1992. 10.1016/0006-8993(92)91031-9
2) T. Akin and K.
Najafi, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration
Applications," IEEE Int. Conf. on Solid-State Sensors and Actuators
(TRANSDUCERS'91), pp. 128-131, San Francisco, CA, June 1991. 10.1109/10.284958
1) T. Akin, B.
Ziaie, and K. Najafi, "RF Telemetry Powering and Control of Hermetically-Sealed
Integrated Sensors and Actuators," Digest, IEEE Solid-State Sensors and
Actuators Workshop, pp. 145-148, Hilton Head, SC, June 1990. 10.1109/solsen.1990.109840
National Journal and Conference Publications
28) E.
Yıldırım, T. Akin ve
M. A. S. Arıkan “MEMS Malzeme Karakterizasyonu için Bütünleşik bir
Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve
Gerçekleştirilmesi,” Çankaya
Üniversitesi Journal of Science and Engineering, Vol. 9 No. 1, pp.9-23,
Ankara, Şubat 2012 (in Turkish).
27) O.
Bayraktar, O. Aydın-Civi ve T. Akin
“RF MEMS Anahtarlı Ayarlanabilir Yansıtıcı Dizi Anteni,” URSI Türkiye 5. Bilimsel Kongresi,
pp.132-135, Ankara, Ağustos 2010 (in Turkish).
26) M. F.
Toy, O. Ferhanoglu, O. Akar, T. Akin,
H. Ürey, "Sogutmasiz Kizilötesi Termomekanik Algilayici Tasarimi, Üretimi
ve Testi," 10. Ulusal Fotonik Çalistayi, Kocaeli Üniversitesi, Kocaeli,
Ekim 2008 (in Turkish)
25) C.
Cetintepe, S. Demir, and T. Akin,
"RF MEMS Teknolojisi ile S-Bandi Tumlesik Bant-Geciren Filtre
Yapisi," URSI-Türkiye 2008 4. Bilimsel Kongresi, s. 137-140, Ekim 2008,
Antalya (in Turkish).
24) K.
Topalli, I. Comart, S. Demir, and T.
Akin, "RF MEMS Yapıların Glass Frit ile 0-seviye
Paketlenmesi," URSI-Türkiye 2008 4. Bilimsel Kongresi, s. 110-113, Ekim
2008, Antalya (in Turkish).
23) E.
Ekmekci, K. Topalli, and T. Akin, G.
Turhan-Sayan, "RF-MEMS Anahtarlama Teknigi ile AHR Tipi Metamalzemelerde
Manyetik Rezonans Frekansinin Adaptif Bicimde Ayarlanmasi," URSI-Türkiye
2008 4. Bilimsel Kongresi, s. 106-109, Ekim 2008, Antalya (in Turkish).
22) T. Akin, “Radio Frequency
Micro-Electro-Mechanical Systems (RF MEMS),” Invited, National URSI Symposium Turkey, p. 11, Hacettepe, Ankara,
Türkiye, 6-8 Eylül 2006 (in Turkish).
21) E. U. Temoçin, K.
Topalli, M. Ünlü, I. Istanbulluoglu, H. I. Atasoy, , Ö. Bayraktar, S. Demir, Ö.
Aydin Çivi, S. Koç, T. Akin,
“Esdüzlemsel Dalga Klavuzundan Mikroserit Hatta Geçis Üzerine Çalismalar,” National URSI Symposium Turkey, pp.
448-450, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).
20) Ö. Bayraktar, K.
Topalli, M. Ünlü, I. Istanbulluoglu, E. U. Temoçin, H. I. Atasoy, S. Demir, Ö.
Aydin Çivi, S. Koç, T. Akin, “RF
MEMS Teknolojisi ile Yansitici Dizi Anteni Tasarimi,” National URSI Symposium Turkey, pp. 438-440, Hacettepe, Ankara,
Türkiye, 6-8 Eylül 2006 (in Turkish).
19) H. I. Atasoy, M. Ünlü,
K. Topalli, I. Istanbulluoglu, E. U. Temoçin, Ö. Bayraktar, S. Demir, Ö. Aydin
Çivi, S. Koç, T. Akin, “TRL
Kalibrasyonunda Uç Konumlandirmasi ve Geçislerin Etkileri,” National URSI Symposium Turkey, pp.
426-428, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).
18) I. Istanbulluoglu, K.
Topalli, E. U. Temoçin, H. I. Atasoy, M. Ünlü, Ö. Bayraktar, S. Demir, Ö. Aydin
Çivi, S. Koç, T. Akin, “RF MEMS
Tekonolojisi Kullanilarak Tasarlanmis Ayarlanabilir Bant Geçiren Baglanmis-Hat
Süzgeç,” National URSI Symposium Turkey,
pp. 416-418, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).
17) K. Topalli, M. Ünlü, Ö.
Aydin Çivi, S. Demir, S. Koç, T. Akin,
“RF MEMS Teknolojisi ile Tek Parça Faz Dizili Anten Yapisi,” National URSI Symposium Turkey, pp.
413-415, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).
16) H. I. Atasoy, K.
Topalli, M. Ünlü, I. Istanbulluoglu, E. U. Temoçin, Ö. Bayraktar, S. Demir, Ö.
Aydin Çivi, S. Koç, T. Akin, “RF
MEMS Tekonolojisi ile Kapasitif ve Metal-Metal Baglantili Paralel Anahtar
Yapilari”, National URSI Symposium Turkey,
pp. 410-412, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).
15) Mehmet Ünlü, Kagan
Topalli, Simsek Demir, Özlem Aydin Çivi, Sencer Koç, T. Akin, “RF MEMS Teknolojisi ile Ayarlanabilir Empedans Uyumlama
Devresi,” National URSI Symposium Turkey,
pp. 407-409, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).
14) E. Erdil, K. Topalli,
M. Ünlü, Ö. Aydın Çivi, T. Akin,
“RF MEMS Kapasitörler ile Rezonans Frekansi Ayarlanabilen Antenler,” National URSI Symposium Turkey, pp.
404-406, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).
13) Ö. Pasin, T. Akin, “RF MEMS Yapilarinin Vakum
Testi Için Pirani Gauge,” National URSI
Symposium Turkey, pp. 386-388, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006
(in Turkish).
12) K. Topalli, M. Unlu, S.
Demir, O. Aydin Civi, S. Koc, and T.
Akin, “RF MEMS teknolojisi ile mikroserit ve esduzlemsel dalga kilavuzu hat
ustunde paralel anahtar yapilari,” National
URSI Symposium Turkey, pp. 370-372, 8-10 September 2004 (in Turkish).
11) M. Unlu, K. Topalli, S.
Demir, O. Aydin Civi, S. Koc, and T.
Akin, “Siralanmis MEMS iletim hatlari icin yeni bir model,” National URSI Symposium Turkey, pp.
435-437, 8-10 September 2004 (in Turkish).
10) K. Topalli, H.
Sagkol, M. Ünlü, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "RF MEMS Teknolojisi ile Faz Dizili Anten," URSI-Türkiye'2002, s. 134-137, Eylül
2002 (in Turkish).
9) H. Sagkol, M. Ünlü, K.
Topalli, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "RF MEMS Teknolojisi ile Mikrodalga Faz
Kaydiricilari," URSI-Türkiye'2002,
s. 138-141, Eylül 2002 (in Turkish).
8) M. Ünlü, H. Sagkol, K.
Topalli, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "RF MEMS Teknolojisi ile Ayarlanabilir Empedans
Uyumlama ve Güç Bölücü Devreleri," URSI-Türkiye'2002,
s. 142-145, Eylül 2002 (in Turkish).
7) M. Ünlü, H. Sagkol, K.
Topalli, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "Anten Uygulamalari için Yeni MEMS Anahtar
Yapilari," URSI-Türkiye'2002, s.
146-149, Eylül 2002 (in Turkish).
6) H. Kulah ve T. Akin,
"CMOS Elektronik Devreli PtSi Schottky-Bariyer Kýzýlötesi Gece-Görüþ
Dedektörü," Kaynak Elektrik Dergisi, Sayfa 103-110, 1997/1 (in
Turkish).
5) Tayfun Akin,
"Mikro-Elektro-Mekanik Sistemler (MEMS) ve Silisyum Mikroisleme
Teknikleri," Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal
Kongresi, Cagrili Bildiri, Eylul, 1997 (in Turkish).
4) Z. Olgun, O. Akar, H.
Kulah ve T. Akin, "Standart CMOS Teknolojisi ile Üretilebilen
Isýlküme Tipi Kýzýlötesi Dedektörler," Elektrik-Elektronik-Bilgisayar
Muhendisligi 7. Ulusal Kongresi, s. 75-78, Eylul, 1997 (in Turkish).
3) O. Akar ve T. Akin,
"Endüstriyel ve Biyomedikal Uygulamalarý için Silisyum Mikroiþlenmiþ
Kapasitif Basýnç Sensörü," Elektrik-Elektronik-Bilgisayar Muhendisligi 7.
Ulusal Kongresi, s. 83-86, Eylul, 1997 (in Turkish).
2) H. Kulah ve T. Akin,
"PtSi Schottky-Bariyer Gece-Görüþ Dedektörü ve CMOS Elektronik Okuma
Devresi Tasarýmý," Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal
Kongresi, s. 79-82, Eylul, 1997 (in Turkish).
1) Tayfun Akin,
"Micro-Electro-Mechanical Systems (MEMS) and Silicon Micromachining
Technologies," Digest, IEEE Conf. for Electrical & Computer
Engineering Students, pp. 43-48, Bogazici University, September 1997.