Prof. Dr. Tayfun AKIN
|
· Micro-Electro-Mechanical Systems
(MEMS) (What
are MEMS?) · MicroSystems Technologies (MTS) ·
Silicon-based integrated microsensors and
transducers · Infrared detectors and readout circuitry · Micromachined Gyroscopes · RF MEMS · Analog and
digital integrated circuit design · Silicon
micromachining · Implantable microtelemetry systems and transducers for biomedical applications |