Prof.
Dr. Tayfun AKIN
ResearcherID Link (http://www.researcherid.com/rid/O-6924-2015)
Book Chapter
T. Akin, “CMOS-based Thermal Sensors” in Advanced Micro
& Nanosystems Volume 2: CMOS-MEMS,
Edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J. Kornivk, O. Tabata, Wiley-VCH, 2005. AMN-Flyer
International Journal Publications
68) B. Atik, E. Dirican, O. Demirörs,
H. Altan, O. Esenturk, M. Yildirim,
and T. Akin, “Tuning Structural, Electrical, and THz Optical Properties of VxOy Films with
W-doping,” Journal of Alloys
and Compounds, Vol. 903, 15 May 2022, 163922; 10.1016/j.jallcom.2022.163922
67) M. M. Torunbalci, H. D. Gavcar, F. Yesil, S. E. Alper, and T. Akin, “An All-Silicon Process
Platform for Wafer-Level Vacuum Packaged MEMS Devices,” IEEE Sensors Journal, 2021. 10.1109/JSEN.2021.3073928
66) K. Akel,
M. Hostut, T.
Akin, and Y. Ergün, “Interband
Optical Absorption obtained by Pseudopotential Method for Type-II InAs/GaSb SL Photodetectors,” Journal of Physics D: Applied
Physics, Vol. 54, No. 19, pp. 1951032021, Feb. 2021. 10.1088/1361-6463/abe3ae
65) O. Temel,
Y. E. Kalay, and T.
Akin, “Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding
with Thin Au-Sn Layers for MEMS Encapsulation,” IEEE/ASME Journal of Microelectromechanical Systems,
Vol. 30, No. 1, pp. 64-71, Feb. 2021. 10.1109/JMEMS.2020.3040039
64) M. Y. Tanrikulu, C. Yildizak, A. K. Okyay, O. Akar, A. Sarac, and T. Akin,
"Realization of Single Layer Microbolometer Detector Pixel Using ZnO Material," IEEE Sensors Journal,
Vol. 20, Iss: 17, pp. 9677-9684, May 2020. 10.1109/JSEN.2020.2992991
63) G. Demirhan
Aydin and T. Akin, “Resonance-Based
Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process,” Adv. Mater. Lett., 11 (1),
20011462 (1-8), Jan. 2020. 10.5185/amlett.2020.011462
62) I. Comart,
C. Cetintepe, E. Sagiroglu,
S. Demir, and T. Akin, “Development and
Modeling of a Wafer-Level BCB Packaging Method for Capacitive RF MEMS
Switches,” IEEE/ASME Journal of MicroElectroMechanical
Systems, Vol. 28, No. 4, pp. 724-731, August 2019. 10.1109/JMEMS.2019.2912745
61) R. Cetin and T. Akin, “Numerical and Experimental
Investigation into LWIR Transmission Performance of Complementary Silicon
Subwavelength Antireflection Grating (SWARG) Structures,” Scientific Reports, Vol. 9, No. 1, p. 4683, March
2019. 10.1038/s41598-019-41107-2
60) M. Hostut,
T. Tansel, A. Kilic, T. Akin, and Y. Ergun, “The Detailed
Analysis of Wavefunction Overlaps for InAs/AlSb/GaSb Based N-structure
Type-II SL pin Photodetectors,” Physica
Scripta, Vol. 94, No. 7, pp. 075007-075012, April 2019. 10.1088/1402-4896/ab13f9
59) S. B Yarman, O. Palamutcuogullari, I.
Kaya, O. Kizilbey, A. Aksen,
T. Akin, Z. L. Ozkan,
I. Oksar, and T. Nesimoglu,
“Microwave Engineering Expertise in Turkey,” IEEE Microwave Magazine, Vol. 19, No. 3, pp. 135-140, May
2018. 10.1109/MMM.2018.2802326
58) K. Demirel,
E. Yazgan, S. Demir, and T. Akin, “A folded leg Ka-band RF MEMS shunt switch with amorphous
silicon (a-Si) sacrificial layer,” Microsystem
Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,
Vol. 23, Iss. 5, pp. 1191-1200, Springer, May 2017. 10.1007/s00542-016-2892-5
57) A. Aydemir,
Y. Terzioglu, and T. Akin, “A New Design and a Fabrication Approach to Realize a High
Performance Three Axes Capacitive MEMS Accelerometer,” Sensors and Actuators A, Vol. 244, pp. 324-333, June 2016. 10.1016/j.sna.2016.04.007
56) S. H. Altinoluk, H. E. Ciftpinar, O. Demircioglu, F. Es, G. Baytemir,
O. Akar, A. Aydemir, A. Sarac, T. Akin,
and R. Turan, “Light Trapping by Micro and Nano-Hole
Texturing of Single-Crystalline Silicon Solar Cells,” Elsevier Energy Procedia, pp. 291-296, 2016. 10.1016/j.egypro.2016.07.081
55) T. Kose,
K. Azgin, and T.
Akin, “Design and Fabrication of a High Performance Resonant MEMS
Temperature Sensor,” Journal of
Micromechanics and Microengineering, March 2016. 10.1088/0960-1317/26/4/045012
54) K. Demirel,
S. Demir, E. Yazgan, and T. Akin, “A New Temperature-Tolerant RF MEMS Switch Structure Design
and Fabrication for Ka-Band Applications,” IEEE/ASME Journal of Microelectromechanical Systems,
Vol. 25, No. 1, pp. 60-68, Feb. 2016. 10.1109/JMEMS.2015.2485659
53) M. M. Torunbalci, S. E. Alper, and T. Akin, “A Method for Wafer Level
Hermetic Packaging of SOI-MEMS Devices with Embedded Vertical Feedthroughs
using Advanced MEMS Process,” Journal
of Micromechanics and Microengineering, Vol. 25, 125030, pp. 1-11, 2015. http://dx.doi.org/10.1088/0960-1317/25/12/125030
52) S. Tez, U. Aykutlu, M. M. Torunbalci, and T. Akin, “A Bulk-Micromachined
Three-Axis Capacitive MEMS Accelerometer on a Single Die,” IEEE/ASME Journal
of Microelectromechanical Systems,Vol. 24, No. 5, pp. 1264-1274,
October 2015. 2015. 10.1109/JMEMS.2015.2451079
51) K. Demirel,
S. Demir; E. Yazgan, and T. Akin, “Cantilever Type Radio Frequency MEMS Shunt Capacitive
Switch Design and Fabrication,” J.
Micro/Nanolith. MEMS MOEMS 14(3), 035005
(2015). 10.1117/1.JMM.14.3.035005
50) M. M. Torunbalci, S. E. Alper, and T. Akin, “Advanced MEMS (aMEMS) Process for Wafer Level Hermetic Encapsulation of
MEMS Devices using SOI Cap Wafers with Vertical Feedthroughs,” IEEE/ASME Journal of
Microelectromechanical Systems, Vol. 24, No. 3, pp. 556-564, June 2015.
10.1109/JMEMS.2015.2406341
49) M. M. Torunbalci, S. E. Alper, and T. Akin, “Wafer Level Hermetic Sealing
of MEMS Devices with Vertical Feedthroughs using Anodic Bonding,” Sensors and Actuators A, Vol.
224, pp. 169-176, April 2015. 10.1016/j.sna.2015.01.034
48) C. Cetintepe,
E. S. Topalli, S. Demir, O. A. Civi,
and T. Akin, “A Fabrication Process
based on Structural Layer Formation using Au–Au Thermocompression Bonding for
RF MEMS Capacitive Switches and Their Performance,” Int. Journal of Microwave and Wireless Technologies, Vol. 6,
No. 5, pp. 473-480, July 2014. 10.1017/S1759078714000968
47) U. Sonmez,
H. Kulah, and T.
Akin, “A ΣΔ Micro Accelerometer with 6 µg/√Hz Resolution
and 130 dB Dynamic Range,” Analog
Integrated Circuits and Signal Processing, Vol. 81, No. 2, pp 471-485, November 2014. 10.1007/s10470-014-0393-y
46) E. Battal,
S. Bolat, M. Y. Tanrikulu,
A. K. Okyay, and T.
Akin, “Atomic Layer Deposited Zinc-Oxide as Tunable Uncooled Infrared
Microbolometer Material,” Physica Status
Solidi A: Applications and Materials Science, Vol. 211, No. 11,
pp. 2475–2482, November 2014. 10.1002/pssa.201431195
45) I. Comart,
K. Topalli, S. Demir, and T. Akin, “Microwave Characterization of a Wafer-Level Packaging
Approach for RF MEMS Devices Using Glass Frit Bonding,” IEEE Sensors Journal, Vol. 14, No. 6, pp. 2006-2011, June
2014. 10.1109/JSEN.2014.2308256
44) J. Musayev,
Y. Adıgüzel, H. Kulah,
Selim Eminoglu, and T. Akin, “Label-free DNA Detection Using a Charge Sensitive CMOS
Microarray Sensor Chip,” IEEE Sensors
Journal, Vol. 14, No. 5, pp. 1608-1616, May 2014. 10.1109/JSEN.2014.2301693
43) J. Musayev,
C. Altiner, Y. Adıgüzel,
H. Kulah, Selim Eminoglu,
and T. Akin, “Capturing and
Detection of MCF-7 Breast Cancer Cells with a CMOS Image Sensor,” Sensors
and Actuators A, Vol. 215, pp. 105-114, August 2014. 10.1016/j.sna.2013.12.003
42) S. Sonmezoglu,
S. E. Alper, and T.
Akin, “An Automatically Mode-Matched MEMS Gyroscope with Wide and Tunable
Bandwidth,” IEEE/ASME Journal of Microelectromechanical
Systems, Vol. 23,
No. 2, pp. 284-297, April 2014. 10.1109/JMEMS.2014.2299234
41) M. Unlu,
S. Demir, and T. Akin, “A
15-40 GHz Frequency Reconfigurable
RF MEMS Phase Shifter,” IEEE Transactions
on Microwave Theory and Techniques, Vol. 61, No. 8, pp. 2865-2877, August 2013. 10.1109/TMTT.2013.2271995
40) O. Aydin and T. Akin, “A Bulk-Micromachined
Fully Differential MEMS Accelerometer With Split Interdigitated Fingers,” IEEE Sensors Journal, Vol. 13, No. 8, pp. 2914-2921, August 2013. 10.1109/JSEN.2013.2264667
39) M. Unlu,
S. Demir, and T. Akin, “Triple Stub Circuit
Topology as Simultaneous Insertion Phase, Amplitude, and Impedance Control Circuit for Phased Array
Applications,” IET Microw.
Antennas Propag., Vol. 6, Iss. 13, pp. 1399–1406, 2012. 10.1049/iet-map.2011.0275
38) K. Azgin,
T. Akin, and L. Valdevit,
“Ultra High Dynamic Range Resonant MEMS Load Cells for Micromechanical Test
Frames,” IEEE/ASME Journal of Microelectromechanical
Systems, Vol. 21,
No. 6, pp. 1519-1529, Dec.
2012. 10.1109/JMEMS.2012.2211576
37) A. Aydemir
and T. Akin, “Prevention of Sidewall Redeposition of Etched By-Products in Dry Au Etch Process,”
Journal of Micromechanics and Microengineering, Vol. 22, No. 7, 074004, pp. 1‑6,
June 2012. 10.1088/0960-1317/22/7/074004
36) E. Tatar, S. E. Alper, and T. Akin,
“Quadrature Error Compensation and Corresponding Effects on the Performance of
Fully Decoupled MEMS Gyroscopes,” IEEE/ASME Journal
of MicroElectroMechanical Systems, Vol. 21, No. 3, pp. 656-667, June 2012. 10.1109/JMEMS.2012.2189356
35) O. Bayraktar,
O. Aydin-Civi, and T. Akin, “Beam Switching Reflectarray
Monolithically Integrated with RF MEMS Switches,” IEEE Transactions on Antennas & Propagation, Vol. 60,
No. 2, pp. 854-862, Feb.2012. 10.1109/TAP.2011.2173099
34) C. E. Cansoy, H. Y. Erbil, O. Akar, T. Akin, “Effect of Pattern Size and
Geometry on the Use of Cassie-Baxter Equation for Superhydrophobic Surfaces,” Colloids and Surfaces A: Physicochemical
and Engineering Aspects, Vol. 386, pp. 116-124, August 2011. 10.1016/j.colsurfa.2011.07.005
33) A. Torrents, K. Azgin, S. W. Godfrey, E. S. Topalli,
T. Akin, and L. Valdevit,
“MEMS Resonant Load Cells for Micro-Mechanical Test Frames: Feasibility Study
and Optimal Design,” Journal of
Micromechanics and Microengineering, Vol. 20, No. 12, 125004, pp. 1-17,
Dec. 2010. 10.1088/0960-1317/20/12/125004
32) B. Bayram, O. Akar, and T. Akin,
“Plasma-Activated Direct Bonding of Diamond-on-Insulator Wafers to Thermal
Oxide Grown Silicon Wafers,” Diamond
and Related Materials, Vol. 19, No. 11, pp. 1431-1435, Nov. 2010. 10.1016/j.diamond.2010.08.015
31) I. E. Ocak, R. Kepenek, H. Kulah, and T. Akin,
“A High Performance Sigma-Delta Readout Circuitry for µg Resolution Microaccelerometers,” Analog
Integrated Circuits and Signal Processing, Vol. 64, No. 2, pp.137-145, August 2010 10.1007/s10470-009-9433-4
30)
M. Unlu, K. Topalli, H. I. Atasoy, S. Demir, O. Aydin Civi,
and T. Akin, “Hybrid Connection of
RF MEMS and SMT Components in an Impedance Tuner,” AEU International
Journal of Electronics and Communications, Vol. 64, No. 8, pp. 748-756, August 2010. 10.1016/j.aeue.2010.01.008
29)
K. Topalli,
E. Erdil, O. Aydin Civi, S.
Demir, S. Koc, and T. Akin, “Tunable Dual-Frequency RF MEMS Rectangular Slot
Antennas,” Sensors and Actuators A,
Vol. 156, No. 2, pp. 373-380, December 2009. 10.1016/j.sna.2009.10.005
28)
K. Topalli,
M. Unlu, H. I. Atasoy, S.
Demir, O. A. Civi, and T. Akin, "Empirical Formulation of Bridge Inductance in
Inductively Tuned RF MEMS Shunt Switches," Progress In
Electromagnetics Research, PIER 97, pp. 343-356, 2009. 10.2528/PIER09092502
27)
E. Ekmekci, K. Topalli, T. Akin, and G. Turhan-Sayan,
“A Tunable Multi-Band Metamaterial Design Using Micro-Split SRR Structures,” Optics Express, Vol. 17, No. 18, pp. 16046-58, August 2009. 10.1364/OE.17.016046
26)
K. Sahin, E. Sahin, S. E. Alper, and T. Akin,
“A Wide-Bandwidth and
High-Sensitivity Robust Microgyroscope,”
Journal of Micromechanics and
Microengineering, Vol. 19, No. 7,
074004, pp. 1-8, July 2009. 10.1088/0960-1317/19/7/074004
25)
J. Perruisseau-Carrier,
K. Topalli, and T.
Akin, “Low-loss Ku-band Artificial Transmission Line with MEMS Tuning
Capability,” IEEE Microwave and
Wireless Components Letters, Vol. 19, No. 6, pp.
377-379, June 2009. 10.1109/LMWC.2009.2020022
24)
E. Sagiroglu Topalli, K. Topalli, S. E. Alper, T. Serin,
and T. Akin, “Pirani Vacuum Gauges
using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization
of MEMS Vacuum Packaging,” IEEE Sensors Journal, Vol. 9, No. 3,
pp. 263-270, March 2009. 10.1109/JSEN.2008.2012200
23)
S. E. Alper, Y. Temiz, and T. Akin, “A Compact Angular Rate Sensor
System using a Fully-Decoupled Silicon-on-Glass MEMS Gyroscope,” IEEE/ASME Journal of MicroElectroMechanical
Systems, Vol. 17, No. 6, pp. 1418-1429, Dec. 2008. 10.1109/JMEMS.2008.2007274
22)
B. Alaca, K. B. Toga, O. Akar,
and T. Akin, “Strain-Controlled Bulge Test,”
Journal of Materials Research,
Vol. 23, No. 12, pp. 3295-3302, Dec. 2008. 10.1557/JMR.2008.0395
21)
K. Topalli,
O. Aydin Civi, S. Demir, S. Koc,
and T. Akin, “A Monolithic Phased
Array using 3-bit Distributed RF MEMS Phase Shifters,” IEEE Trans.
Microwave Theory Tech. Techniques, Vol. 56, pp. 270-277, February
2008. 10.1109/TMTT.2007.914377
20)
S. Eminoglu, M. Y. Tanrikulu,
and T. Akin, “A Low-Cost 128x128
Uncooled Infrared Detector Array in CMOS Process,” IEEE/ASME Journal of MicroElectroMechanical
Systems, Vol. 17, No. 1, pp. 20-30, February 2008. 10.1109/JMEMS.2007.910235
19)
B. Okcan and T.
Akin, “A Low-Power Robust Humidity Sensor in a Standard CMOS Process,” IEEE
Transactions on Electron Devices, Vol. 54, No. 11, pp. 3071-3078,
November 2007. 10.1109/TED.2007.907165
18)
S. E. Alper, I. E. Ocak, and T. Akin, “Ultra-Thick and High-Aspect-Ratio Nickel Microgyroscope
using EFABTM Multi-Layer Additive Electroforming,” IEEE/ASME
Journal
of MicroElectroMechanical Systems, Vol. 16, No. 5, pp. 1025-1035, October
2007. 10.1109/JMEMS.2007.902431
17)
E. Erdil, K. Topalli, M. Unlu, O. Aydin Civi, and T. Akin, "Frequency Tunable
Microstrip Patch Antenna using RF MEMS Technology," IEEE Trans.
Antennas and Propagation, vol.55, no.4, p.1193-1196, April 2007. 10.1109/TAP.2007.893426
16)
S. E. Alper, K. Azgin, and T. Akin, “A High-Performance Silicon-on-Insulator MEMS Gyroscope Operating at
Atmospheric Pressure,” Sensors and Actuators A, Vol. 135/1, pp.
34-42, March 2007. 10.1016/j.sna.2006.06.043
15)
S. E. Alper, K. M. Silay, and T. Akin, “A Low-Cost Rate-Grade Nickel Microgyroscope,” Sensors
and Actuators A, Vol. 132/1, pp. 171-181, November 2006. 10.1016/j.sna.2006.03.031
14)
K. Topalli, M. Unlu, S.
Demir, O. Aydin Civi, S. Koc,
and T. Akin, “New Approach for
Modeling Distributed MEMS Transmission Lines,” IEE Proc.
Microwaves, Antennas & Propagation, Vol. 153, pp.152-162, April 2006. 10.1049/ip-map:20050098
13)
S. E. Alper and T. Akin, A Single-Crystal Silicon Symmetrical and Decoupled MEMS Gyroscope on an
Insulating Substrate,” IEEE/ASME
Journal
of MicroElectroMechanical Systems, Vol. 14, No. 4, pp. 707-717, August 2005. 10.1109/JMEMS.2005.845400
12) S. E. Alper
and T. Akin, " Symmetrical and Decoupled Nickel Microgyroscope
on Insulating Substrate," Sensors and Actuators A, Vol. 115/2-3, pp. 336‑350,
2004. 10.1016/j.sna.2004.04.041
11) S. Eminoglu, D. Sabuncuoglu
Tezcan, M.Y. Tanrikulu, and
T. Akin, “Low-Cost Uncooled
Infrared Detectors in CMOS Process,” Sensors and Actuators A, Vol. 109/1-2, pp. 102-113,
Dec. 2003. 10.1016/j.sna.2003.08.013
10) H. Külah
and T. Akin, “A Current Mirroring
Integration Based Readout Circuit for High Performance Infrared FPA
Applications,” IEEE Transactions on
Circuits and Systems II: Analog and Digital Signal Processing,
Vol. 50, No. 4, pp. 181 -186, April 2003.
10.1109/TCSII.2003.807758
9) D. Sabuncuoglu
Tezcan, S. Eminoglu, and T. Akin, “A Low Cost Uncooled Infrared
Microbolometer Detector in Standard CMOS Technology,” IEEE Trans. on Electron Devices, Vol. 50, No. 2, pp. 494-502, Feb. 2003. 10.1109/TED.2002.807453
8) S. E. Alper
and T. Akin, "A Symmetric Surface Micromachined Gyroscope with
Decoupled Oscillation Modes," Sensors and Actuators A, Vol.
97-98C, pp. 337-348, April 2002. 10.1016/S0924-4247(01)00860-3
7) O. Akar, T.
Akin, and K. Najafi, "A Wireless Batch Sealed Absolute Capacitive
Pressure Sensor," Sensors and Actuators A, Vol.95/1,
pp. 29-38, December 2001. 10.1016/S0924-4247(01)00753-1
6) T. Akin, B. Ziaie, S. A. Nikles, and K.
Najafi, “A Modular Micromachined High-Density Connector System for Biomedical
Applications,” IEEE Transactions on Biomedical Engineering, Vol.
46, No.4, pp.471-480, April 1999. 10.1109/10.752944
5)
T. Akin, Z. Olgun,
O. Akar, and H. Kulah,
"An Integrated Thermopile Structure with High Responsivity Using Any
Standard CMOS Technology," Sensors and Actuators A
66, pp. 218-224, April 1998. 10.1016/S0924-4247(98)00038-7
4) T. Akin, K. Najafi, and R.M.
Bradley, "A Wireless Implantable Multichannel Digital Neural Recording
System for a Micromachined Sieve Electrode," IEEE Journal of Solid-State
Circuits, Vol. 33, No.1, pp.109-118, January 1998. 10.1109/4.654942
3) R. M. Bradley, X. Cao, T. Akin,
and K. Najafi, "Long Term Chronic Recording from Peripheral Sensory Fibers
Using a Sieve Electrode Array," The Journal of Neuroscience Methods,
Vol. 73, pp. 177-186, 1997. 10.1016/S0165-0270(97)02225-5
2)
T. Akin, K. Najafi, R. Smoke, and R. M.
Bradley, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration
Applications," IEEE Trans. on Biomedical Engineering, Vol.
BME-41, No. 4, pp. 305-313, April 1994. 10.1109/10.284958
1) R. M. Bradley, R.
Smoke, T. Akin, and K. Najafi, “Functional Regeneration of
Glossopharyngeal Nerve through Micromachined Sieve Electrode Arrays,” Brain
Research Journal, Vol. 594, pp. 84-90, 1992. 10.1016/0006-8993(92)91031-9
International Conference Publications
157) B. Atik,
E. Dirican, O. Demirörs, H.
Altan, O. Esenturk, M. Yildirim,
and T. Akin, “Investigation of Doped
and Undoped VOx Films for Terahertz Microbolometer
Applications,” SPIE Optical Engineering +
Applications, Terahertz Emitters, Receivers, and Applications XII, SPIE
11827, p. 118270J, San Diego, U.S.A., August 2021.
156) O. Demirörs,
B. Atik, E. Dirican, H. Altan, O. Esenturk, M. Yildirim,
and T. Akin, “Optimization of a
Microbolometer Pixel for Operation in the Sub-1 THz Region,” SPIE Optical Engineering + Applications,
Terahertz Emitters, Receivers, and Applications XII, SPIE 11827, p.
118270O, San Diego, U.S.A., August 2021.
155) A. Aydemir
and T. Akin “Self-Packaged Three
Axis Capacitive MEMS Accelerometer” 2020 IEEE 33rd Int. Conf. on Micro Electro
Mechanical Systems (MEMS), Vancouver, BC, CANADA, 18-22 Jan. 2020. 10.1109/MEMS46641.2020.9056192
154) T.
Akin, "Low-Cost LWIR-Band CMOS Infrared (CIR) Microbolometers for High
Volume Applications," 2020 IEEE 33rd Int. Conf. on Micro Electro
Mechanical Systems (MEMS), Vancouver, BC, CANADA, 18-22 Jan. 2020. 10.1109/MEMS46641.2020.9056383
153) F. Tankut,
M.H. Cologlu, H. Ozturk, G. Cilbir,
O.S. Akar, and T
Akin, “A 160x120 LWIR-band CMOS Infrared (CIR) microbolometer,” SPIE Defense and Commercial Sensing
Symposium, Infrared Technology and Applications XLV, SPIE 11002, p.
110021Q, Baltimore, U.S.A, April 2019. 10.1117/12.2521484
152) M. Y. Tanrikulu, C. Yildizak, A. K. Okyay, O. Akar, A. Sarac, and T. Akin,
“Single Layer Microbolometer Detector Pixel Using ZnO
Material,” SPIE Defense and Commercial
Sensing Symposium, Infrared Technology and Applications XLIV, SPIE 10624,
p. 1062417, Orlando, Florida, U.S.A., April 2018. 10.1117/12.2302996
151) O. Erturk
and T. Akin, “Design and
Implementation of High Fill-Factor Structures for Low-Cost CMOS
Microbolometers,” 2018 IEEE Micro Electro
Mechanical Systems (MEMS), Belfast, NORTH IRELAND, Jan 23-25, 2018. 10.1109/MEMSYS.2018.8346649
150) R. Cetin, O. Erturk, and T. Akin,
“Design, Analysis and Implementation of Quarter-wave Absorber Structure for
Uncooled Infrared Detectors with High Fill Factor,” 2018 43rd International
Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Nagoya,
JAPAN, Sep 09-14, 2018. 10.1109/IRMMW-THz.2018.8510442
149) S. Eminoglu,
M. A. Gulden, O. S. Incedere, S. T. Soyer, C. Yalcin, C. M. B. Ustundag,
U. Eksi, and T.
Akin, “A 1024x768-12um Digital ROIC for Uncooled Microbolometer FPAs,” SPIE Defense and Commercial Sensing
Symposium, Infrared Technology and Applications XLIII,, SPIE 10177, p.
0177122, Anaheim, U.S.A, April 2017. 10.1117/12.2263532
148) F. Tankut,
M. H. Cologlu, H. Askar, H. Ozturk, H. K. Dumanli, F. Oruc, B. Tilkioglu, B. Ugur, O. Akar, M. Tepegoz, and T. Akin,
“An 80x80 microbolometer type thermal imaging sensor using the LWIR-band CMOS
infrared (CIR) technology,” SPIE Defense
and Commercial Sensing Symposium, Infrared Technology and Applications XLIII,
SPIE 10177, p. 01771X, Anaheim, U.S.A, April 2017. 10.1117/12.2275161
147) T. Arslan, G. Cilbir, M. Tepegoz, and T. Akin, “An advanced presence
detection system using the CMOS Infrared (CIR) technology,” SPIE Defense and Commercial Sensing Symposium, Infrared Technology and Applications
XLIII, SPIE 10177, p. 101771Y,
Anaheim, U.S.A, April 2017. 10.1117/12.2275165
146) S. Tez, M. M. Torunbalci, T. Akin,
“A Novel Method for Fabricating MEMS Three-Axis Accelerometers using Low
Temperature Au-Sn Eutectic Bonding,” 15th
IEEE Sensors Conference, Orlando, USA, Oct. 2016. 10.1109/ICSENS.2016.7808705
145) T. Kose,
Y. Terzioglu, K. Azgin, and
T. Akin, “A Single-Mass
Self-Resonating Closed-Loop Capacitive MEMS Accelerometer,” 15th IEEE
Sensors Conference, Orlando, USA, Oct. 2016. 10.1109/ICSENS.2016.7808711
144) M. K. Aslan, Y. Demircan, E. Ozgur, U. Gunduz, S. Eminoglu, H. Kulah, and T. Akin,
“A High Throughput Lab-On-A-Chip System for Label Free Quantification of Breast
Cancer Cells Under Continuous Flow,” 26th Anniversary World Congress on
Biosensors, Sweden, May 2016. 10.1016/j.protcy.2017.04.028
143) S. Eminoglu,
O.S. Incedere, N. Bayhan,
M. Isikhan, S.T. Soyer,
C.M.B. Ustundag, S. Kocak,
O. Turan, U. Eksi, and T. Akin, “A 640x512-20um Dual-Polarity
ROIC for MWIR and LWIR Hybrid FPAs,” SPIE
Defense and Security Symposium, Infrared Technology and Applications XLII,
SPIE 9819, p. 981928, Baltimore, U.S.A, April 2016. 10.1117/12.2224743
142) T. Kose,
K. Azgin, and T.
Akin, “Temperature Compensation of Capacitive MEMS Accelerometer by Using
MEMS Oscillator,” 2016 IEEE Int'l
Symposium on Inertial Sensors & Systems (ISISS 2016), pp. 33-36,
California, USA, February 2016. 10.1109/ISISS.2016.7435538
141) Y. Terzioglu,
T. Kose, K. Azgin, and T. Akin, “A Simple Out-of-Plane
Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for
Differential Sensing,” IEEE Sensors
Conference, pp. 525-527, Busan, South Korea, November 1-4, 2015. 10.1109/ICSENS.2015.7370306
140) A. Aydemir
and T. Akin, “Fabrication of a
Three-Axis Capacitive MEMS Accelerometer on a Single Substrate,” IEEE Sensors Conference, Busan, South
Korea, November 1-4, 2015. 10.1109/ICSENS.2015.7370307
139) A. Aydemir
and T. Akin, “An Ultimate Capacitive
MEMS Vertical Accelerometer with Differential Sensing Capability,” The 26th Micromechanics and Micro Systems
Europe Workshop, (MME’15), Toledo, Spain, September 20-23, 2015.
138) A. Aydemir
and T. Akin, “DRIE Process
Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors,” The 26th Micromechanics and Micro Systems
Europe Workshop, (MME’15), Toledo, Spain, September 20-23, 2015.
137) A. Aydemir
and T. Akin, “Process Development
for the Fabrication of a Three Axes Capacitive MEMS Accelerometer,” The 29th European Conference on Solid -State
Transducers (Eurosensors 2015), pp. 727-730,
Freiburg, Germany, September 6-9, 2015. 10.1016/j.proeng.2015.08.773
136) B. Kebapci,
F. Tankut, H. Altan, and T. Akin “Detection of the mm-wave
radiation using a low-cost LWIR microbolometer camera from a multiplied
Schottky diode based source,” SPIE Defense and Security Symposium, Millimetre Wave and Terahertz Sensors and Technology VIII,
SPIE 9651, Toulouse, France, pp. 96510L-96510L-5, September 2015. 10.1117/12.2199450
135) M. M. Torunbalci, S. E. Alper, and T. Akin, “The Advanced MEMS (aMEMS) Process for Fabricating Wafer Level Vacuum Packaged
SOI-MEMS Devices with Embedded Vertical Feedthroughs,” The 18th International Conference on Solid-State Sensors, Actuators and
Microsystems (TRANSDUCERS 2015), pp. 472-475, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7180963
134) H. D. Gavcar, K.Azgin, S. E. Alper, and T. Akin,
“An Automatic Acceleration Compensation System for A Single-Mass MEMS
Gyroscope,” The 18th International
Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS
2015), pp. 19-22, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7180850
133) F. Yesil,
S. E. Alper, and T.
Akin, “An Automatic Mode Matching System for a High Q-Factor MEMS Gyroscope
using a Decoupled Perturbation Signal,” The
18th International Conference on Solid-State Sensors, Actuators and
Microsystems (TRANSDUCERS 2015), pp. 1148-1151, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7181131
132) Y. Demircan, S. Orguc, J. Musayev, E. Ozgur, M. Erdem, U. Gunduz, S. Eminoglu, H. Kulah, T. Akin, “Label-Free Detection of Leukemia Cells with a Lab-on-a-Chip System Integrating Dielectrophoresis and CMOS Imaging,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), pp. 1589-1592, Alaska, USA, June 2015. 10.1109/TRANSDUCERS.2015.7181243
131) S. Eminoglu, M. Isikhan, N. Bayhan, M. A. Gulden, O. S. Incedere,
S. T. Soyer; S.Kocak, C. Yalcin, M. C. B. Ustundag, O.
Turan, U. Eksi, and T. Akin, “A 1280×1024-15μm CTIA ROIC
for SWIR FPAs,” SPIE Defense and Security Symposium, Infrared Technology and Applications XLI, SPIE 9451, p. 94510W, Baltimore,
U.S.A, April 2015. 10.1117/12.2179537
130)
S. Eminoglu, M. A. Gulden, N. Bayhan,
O. S. Incedere, M. Isikhan,
S. T. Soyer, C. Yalcin, C. M. B. Ustundag,
S. Kocak, O. Turan, U. Eksi, and T. Akin, “A 640×480-17μm ROIC for Uncooled
Microbolometer FPAs,” SPIE Defense and
Security Symposium, Infrared Technology and Applications XLI, SPIE 9451, p.
94510Z, Baltimore, U.S.A, April 2015. 10.1117/12.2179538
129)
O. Bayraktar, E. Kobal, Y. Sevinc, C. Cetintepe, I. Comart, K. Demirel, E. Sagiroglu Topalli, T. Akin, S. Demir, and O. A. Civi, “RF MEMS Based Millimeter Wave Phased Array for Short
Range Communication,” European Conf. on Antennas and Propagation (EuCAP), pp. 1-5, Lisbon, Portugal, 13-17 May 2015.
128) M. M. Torunbalci,
S. E. Alper, and T.
Akin, “Die Size Reduction by Optimizing the Dimensions of the Vertical
Feedthrough Pitch and Sealing Area in the Advanced MEMS Process,” 2015 IEEE Int'l Symposium on Inertial
Sensors & Systems (ISISS 2015), pp. 1-4, Hawaii, March 23-26, 2015.
127) T. Kose,
Y. Terzioglu, K. Azgin, and
T. Akin, “A Single Mass Two-Axis
Capacitive MEMS Accelerometer with Force Rebalance,” 2015 IEEE Int'l Symposium on Inertial Sensors & Systems (ISISS
2015), pp. 1-4, Hapuna Beach, HI, USA, March
23-26, 2015. 10.1109/ISISS.2015.7102371
126) M. M. Torunbalci,
S. E. Alper, and T.
Akin, “A Novel Fabrication and Wafer Level Hermetic Sealing Method for
SOI-MEMS Devices using SOI Cap Wafers,” The
28th IEEE International Conference on Micro Electro Mechanical
Systems (MEMS 2015), pp. 409-412, Estoril, Portugal, January 2015. 10.1109/MEMSYS.2015.7050976
125) E. C. Demir, M. M. Torunbalci, I. Donmez, Y. E. Kalay, and T. Akin,
“Fabrication and Characterization of Gold-Tin Eutectic Bonding for Hermetic
Packaging of MEMS Devices,” The 16th
Electronics Packaging Technology Conference (EPTC 2014), pp. 241-245,
Marina Bay, Singapore, December 2014. 10.1109/EPTC.2014.7028329
124) M. M. Torunbalci,
E. C. Demir, I. Donmez, S. E. Alper,
and T. Akin, “Gold-Tin Eutectic
Bonding for Hermetic Packaging of MEMS Devices with Vertical Feedthroughs,” IEEE Sensors 2014, Valencia, Spain,
November 2014. 10.1109/ICSENS.2014.6985473
123) M. M. Torunbalci,
S. E. Alper, and T.
Akin, “A Method of Fabricating Vacuum Packages with Vertical Feedthroughs
in a Wafer Level Anodic Bonding Process,” Eurosensors XXVIII, Brescia, Italy, September 2014. 10.1016/j.proeng.2014.11.297
122) Y. Terzioglu,
S. E. Alper, K. Azgin, and T. Akin, “A Capacitive MEMS
Accelerometer Readout with Concurrent Detection and Feedback using Discrete
Components,” IEEE/ION Position, Location
and Navigation Symposium (PLANS 2014), pp. 12-15, Monterey, CA, USA, May
5-8, 2014. 10.1109/PLANS.2014.6851351
121) B. Kebapci,
O. Dervisoglu, E. Battal;
A. K. Okyay, and T.
Akin, “Broadband Absorption Enhancement in an Uncooled Microbolometer
Infrared Detector,” SPIE Defense and
Security Symposium, Infrared Technology and Applications XL, SPIE Vol.
9070, p. 907021, Baltimore, U.S.A, May 2014. 10.1117/12.2069937
120) S. Eminoglu,
M. A. Gulden, N. Bayhan, O. S. Incedere,
S. T. Soyer, C. M. B. Ustundag,
M. Isikhan, S. Kocak, O. Turan, C. Yalcin, and T.
Akin, “MT3825BA: A 384×288-25µm ROIC for Uncooled Microbolometer FPAs,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XL, SPIE Vol. 9070, p. 907024, Baltimore,
U.S.A, May 2014. 10.1117/12.2057510
119) M. Tepegoz,
A. Kucukkomurler, F. Tankut,
S. Eminoglu, and T.
Akin, “A Miniature Low-Cost LWIR Camera with a 160×120 Microbolometer FPA,”
SPIE Defense and Security Symposium,
Infrared Technology and Applications XL, SPIE Vol. 9070, p. 90701O, Baltimore,
U.S.A, May 2014. 10.1117/12.2057508
118) M. M. Torunbalci,
S. E. Alper, and T.
Akin, “Wafer Level Hermetic Encapsulation of MEMS Inertial Sensors using
SOI Cap Wafers with Vertical Feedthroughs,” IEEE Int. Symposium on Inertial
Sensors and Systems (ISISS’14), pp. 1-2, Laguna Beach, California, USA, February
2014. 10.1109/ISISS.2014.6782539
117) S. Sonmezoglu,
H. D. Gavcar, K. Azgin, S.
E. Alper, and T.
Akin, “Simultaneous Detection of Linear and Coriolis Accelerations on a
Mode-Matched MEMS Gyroscope,” The 27th
IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
pp. 32-35, San Francisco, U.S.A., January 2014. 10.1109/MEMSYS.2014.6765566
116) S. Tez and T. Akin, “Fabrication
of a Sandwich Type Three Axis Capacitive MEMS Accelerometer,” IEEE Sensors Conference, pp. 1-4,
Baltimore, USA, November 2013. 10.1109/ICSENS.2013.6688598
115) E. Topalli,
C. Cetintepe, O. Aydin-Civi,
S. Demir, and T. Akin, “A
Fabrication Process Flow for Stacked Structural Layer Formation Using Au-Au
Thermocompression Bonding for RF MEMS Capacitive Switches”, 14th Int. Symposium
on RF-MEMS and RF-Microsystems, Potsdam, Germany, July 1-3, 2013.
114) S. Sonmezoglu,
S. E. Alper, and T.
Akin, “A High Performance Automatic Mode Matched
MEMS Gyroscope with an Improved Thermal Stability of the Scale Factor,” The 17th International Conference on
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2013),
pp.2519-2522, Barcelona, Spain, 16-20 June 2013. 10.1109/Transducers.2013.6627318
113) O. Erturk,
E. Battal, S. E. Kucuk, A.
K. Okyay, and T.
Akin, “A Plasmonically Enhanced Pixel Structure
for Uncooled Microbolometer Detectors,” SPIE
Defense and Security Symposium, Infrared Technology and Applications XXXIX,
SPIE Vol. 8704, Baltimore, U.S.A, April
2013. 10.1117/12.2019540
112) S. Eminoglu
and T. Akin, “MT3250BA: A
320×256-50µm Snapshot Microbolometer ROIC for High-Resistance Detector Arrays,”
SPIE Defense and Security Symposium,
Infrared Technology and Applications XXXIX, SPIE Vol. 8704, Baltimore, U.S.A, April 2013. 10.1117/12.2019525
111) S. Eminoglu,
M. Isikhan, N. Bayhan, M.
A. Gulden, O. S. Incedere, S. T. Soyer,
S. Kocak, G. S. Yilmaz, and T. Akin, “MT6415CA: A 640×512-15µm CTIA ROIC for SWIR InGaAs Detector Arrays,” SPIE Defense and Security Symposium, Infrared Technology and
Applications XXXIX, SPIE Vol. 8704, Baltimore,
U.S.A, April 2013. 10.1117/12.2019519
110) J. Musayev,
Y. Adiguzel, H. Kulah, S. Eminoglu, T. Akin,
“Cell Detection using a CMOS Image Sensor with Modified Pixel Structure
Suitable for Bio-Chemical Surface Activation,” The 26th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS 2013), pp. 941-944, Taipei, Taiwan, January 2013. 10.1109/MEMSYS.2013.6474400
109) O. Aydin and T. Akin, “A Bulk-Micromachined
Fully-Differential MEMS Accelerometer with Interdigitated Fingers,” The 11th Annual IEEE Conference on Sensors
(SENSORS-12), Taipei, Taiwan,
October 28-31, 2012. 10.1109/ICSENS.2012.6411038
108) S. Keskin,
A. Aydemir, and T.
Akin, “Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp
Sidewall,” The 23rd Micromechanics and
Micro Systems Europe Workshop, (MME’12), Ilmenau,
Germany, September 9-12, 2012.
107) S. Tez and T. Akin, “Comparison
of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer” The 26th European
Conference on Solid -State Transducers
(Eurosensors 2012), Krakow, Poland, September 09-12, 2012. 10.1016/j.proeng.2012.09.153
106) I. Comart,
C. Cetintepe, S. Demir, and T. Akin, "A 35 GHz High Isolation RF MEMS SPDT Switch," The 13th International. Symposium
on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July
2012.
105) C. Cetintepe,
K. Demirel, S. Demir, and T. Akin, "A 5-Bit DMTL Phase Shifter with Analog Tuning
Capabilities," The 13th
International. Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012),
Antalya, Turkey, 2-4 July 2012.
104) K. K. Tokgoz, S. Demir, and T.
Akin, "Surface Micromachining Implementation of S-Band 4-bit Phase
Shifter," The 13th
International. Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012),
Antalya, Turkey, 2-4 July 2012.
103) O. Kilic,
I. Comart, S. Demir, and T. Akin, "3-bit CPW Phase Shifter Implemented by a Reduced
Branch Line Coupler," The 13th
International. Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012),
Antalya, Turkey, 2-4 July 2012.
102) M. Tepegoz,
A. Oguz, A. Toprak, S. U. Senveli, E. Canga, M. Y. Tanrikulu, and T.
Akin, “An Uncooled Microbolometer Focal Plane Array Using Heating Based
Resistance Nonuniformity Compensation,” SPIE
Defense and Security Symposium, Infrared Technology and Applications XXXVIII,
SPIE Vol. 8353, pp. 83531E-1-4, Baltimore,
U.S.A, April 2012. 10.1117/12.964525
101) S. Z. Lulec, S. E. Kucuk, E. Battal, A. K. Okyay, M. Y. Tanrikulu, and T.
Akin, “An Analysis for the Broad-Band Absorption Enhancement Using
Plasmonic Structures on Uncooled Infrared Detector Pixels,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XXXVIII, SPIE Vol. 8353, pp.
83531D-1-4, Baltimore, U.S.A, April
2012. 10.1117/12.964549
100) S. Keskin
and T. Akin, “The First Fabricated
Dual-Band Uncooled Infrared Microbolometer Detector with a Tunable Micro-Mirror
Structure,” SPIE Defense and Security
Symposium, Infrared Technology and Applications XXXVIII, SPIE Vol. 8353,
pp. 83531C-1-4, Baltimore, U.S.A, April
2012. 10.1117/12.964551
99) S. Eminoglu, Y. U. Mahsereci, C. Altiner, and T. Akin, “MT6425CA: a 640 × 512 - 25µm
CTIA ROIC for SWIR InGaAs Detector Arrays,” SPIE Defense and Security Symposium, Infrared Technology and
Applications XXXVIII,
SPIE Vol. 8353, pp. 83530D-1-4, Baltimore,
U.S.A, April 2012. 10.1117/12.964548
98) S. Sonmezoglu,
S. E. Alper, and T.
Akin, “An Automatically Mode-Matched MEMS Gyroscope with 50 Hz Bandwidth,” The 25th IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2012), pp. 523-526,
Paris, France, Jan. 29-Feb.2, 2012. 10.1109/MEMSYS.2012.6170231
97) E. Tatar, M. M. Torunbalci, S. E. Alper, and T. Akin, “A Method and Electrical Model
for the Anodic Bonding of SOI and Glass Wafers,” The 25th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS 2012), pp. 68-71, Paris, France, Jan. 29-Feb.2,
2012. 10.1109/MEMSYS.2012.6170095
96) B. Eminoglu,
S. E. Alper, and T.
Akin, “A New Baseband Equivalent Model for Sense Mode Dynamics and its
Effects on Force-Feedback Controller Design for MEMS Gyroscopes,” The 10th Annual IEEE Conference on Sensors
(SENSORS-11), Limerick, Ireland, October 28-31, 2011. 10.1109/ICSENS.2011.6127222
95) M. M. Torunbalci, E. Tatar, S. E. Alper,
and T. Akin, “Comparison of Two
Alternative Silicon-on-Glass Microfabrication Processes for MEMS Inertial
Sensors,” Eurosensors XXV, Athens, Greece, September 2011. 10.1016/j.proeng.2011.12.221
94) B. Eminoglu,
S. E. Alper, and T.
Akin, “An Optimized Analog Drive-Mode Controller for Vibratory MEMS
Gyroscopes,” Eurosensors XXV, Athens, Greece, September 2011. 10.1016/j.proeng.2011.12.323
93) O. Aydin-Civi, S. Demir, T.
Akin, “Reconfigurable Antennas Using RF-MEMS research in Turkey”, 2011 IEEE MTT-S International Microwave Symposium,
Digest, pp.1-4, June 2011. 10.1109/MWSYM.2011.5973201
92) A. Aydemir and T. Akin, “Prevention of Sidewall Redeposition of Etched Byproducts in Dry Au Etch
Process,” The
22nd Micromechanics and
Micro Systems Europe Workshop, (MME’11), Toensberg, Norway, June 19-22, 2011. 10.1088/0960-1317/22/7/074004
91) B. Eminoglu,
S. E. Alper, and T.
Akin, “A Novel, Simple, and Q-Independent Self Oscillation Loop Design for
Vibratory MEMS Gyroscopes,” The 16th
International Conference on Solid-State Sensors, Actuators and Microsystems
(Transducers’11), pp. 1440-1443, Beijing, China, June 5-9, 2011. 10.1109/TRANSDUCERS.2011.5969590
90) U. Sonmez, H. Kulah, and T. Akin, “A Fourth Order Unconstrained
ΣΔ Capacitive Accelerometer,” The
16th International Conference on Solid-State Sensors, Actuators and
Microsystems (Transducers’11), pp. 707-710, Beijing, China, June 5-9, 2011.
10.1109/TRANSDUCERS.2011.5969214
89) E. Sahin, S. E. Alper, and T. Akin, “Experimental Evaluation of
Alternative Drive-Mode Control Electronics Developed for High-Performance MEMS
Gyroscopes,” The 16th International
Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11),
pp. 2817-2820, Beijing, China, June 5-9, 2011. 10.1109/TRANSDUCERS.2011.5969566
88) S. E. Kucuk,
M. Y. Tanrikulu, and T. Akin, “A Detailed Analysis for the Absorption Coefficient of
Multilevel Uncooled Infrared Detectors,” SPIE
Defense and Security Symposium, Infrared Technology and Applications XXXVII,
SPIE Vol. 8012, pp. 80121R/1-8, Orlando,
U.S.A, April 2011. 10.1117/12.890236
87) A. Toprak,
M. Tepegoz, and T.
Akin, “A Two-Stage Digital-to-Analog Converter for Bias Correction in
Uncooled Microbolometer Arrays,” SPIE
Defense and Security Symposium, Infrared Technology and Applications XXXVII,
SPIE Vol. 8012, pp. 80121S/1-6, Orlando,
U.S.A, April 2011. 10.1117/12.890235
86) S. U. Senveli, M. Y. Tanrikulu, and T. Akin, “A Thermal Conductance
Optimization and Measurement Approach for Uncooled Microbolometers,” SPIE Defense and Security Symposium,
Infrared Technology and Applications XXXVII, SPIE Vol. 8012, pp.
80121T/1-10, Orlando, U.S.A, April
2011. 10.1117/12.890234
85) K. Azgin,
C. Ro, A. Torrents, T. Akin, and L. Valdevit, “A Resonant Tuning Fork Force Sensor with
Unprecedented Combination Of Resolution and Range,” The 24th IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2011), pp. 545-548,
Cancun, Mexico, January 2011. 10.1109/MEMSYS.2011.5734482
84) E. Tatar, S. E. Alper, and T. Akin,
“Effect of Quadrature Error on the Performance of a Fully-Decoupled MEMS
Gyroscope,” The 24th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2011),
pp. 569-572, Cancun, Mexico, January 2011. 10.1109/MEMSYS.2011.5734488
83) C. Guclu,
C. Cetintepe, O. Aydin-Civi,
S. Demir, and T. Akin, “35 GHz
Phased Array Antenna using DMTL Phase Shifters,” 10th Mediterranean Microwave Symposium (MMS2010), METU-NCC,
pp.114-117, 25-27 August, 2010. 10.1109/MMW.2010.5605151
82) O. Bayraktar,
O. Aydın-Civi, and T. Akin, “Beam Switching Reflectarray
with MEMS Controls,” European Conference on Antennas & Propagation, Spain,
April, 2010.
81) C. E. Cansoy, H. Y. Erbil, O. Akar, and
T. Akin, “Investigation of Contact
Angle Behavior on Superhydrophobic Patterned Surfaces,” 13th European Conference on Applications of Surface and Interface
Analysis, October 18-23, 2009 Antalya, Turkey.
80) E. Ekmekci,
K. Topalli, T.
Akin, and G. Turhan-Sayan “Effects of Array
Dimensions on the Resonance Characteristics of SRR Type Metamaterial Arrays
with Small Sizes: Simulations and Experiments,” Progress in Electromagnetics
Research Symposium (PIERS 2009 Moscow), pp. 83-86, Moscow, Russia, August 2009.
https://www.researchgate.net/publication/266417802
79) S. E. Alper, A. Aydemir, and T. Akin, “Stepped-Etching for
Preserving Critical Dimensions in Through-Wafer Deep Reactive Ion Etching of
Thick Silicon,” The 15th International
Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09),
pp. 1110-1113, Denver, June 2009. 10.1109/SENSOR.2009.5285924
78) E. Ekmekci,
K. Topalli, T.
Akin, and G. Turhan-Sayan, “A Feasibility Study
for Tunable Metamaterial Design Using Multi-Split SRR Structures and RF MEMS
Switching,” IEEE Antennas and Propagation Society International
Symposium/USNC/URSI National Radio Science Meeting, South-Carolina, U.S.A. pp. 1548-1551, June 2009. 10.1109/APS.2009.5171933
77) A. Oguz,
M. Tepegoz, and T.
Akin, “A Bias Heating Cancellation Method for Resistive Uncooled
Microbolometer Detectors,” SPIE Defense
and Security Symposium, Infrared
Technology and Applications XXXV, SPIE Vol. 7298, pp. 72982G/1-8, Orlando, U.S.A, April 2009. 10.1117/12.823720
76) A. Toprak,
M. Tepegoz, and T.
Akin, “A Column-Based Two-Stage Analog-to-Digital Converter for Uncooled
Microbolometer Arrays,” SPIE Defense and
Security Symposium, Infrared
Technology and Applications XXXV, SPIE Vol. 7298, pp. 72982H/1-8, Orlando, U.S.A, April 2009. 10.1117/12.823721
75) E. Ekmekci,
K. Topalli, T.
Akin, and G. Turhan-Sayan, “Experimental
Investigation of Metamaterial Array Structures with Split Ring Resonators,”
IEEE 17th Signal Processing and Communications Applications Conf., Antalya,
TURKEY, pp. 551-554, April 2009. 10.1109/SIU.2009.5136394
74) S. E. Alper, K. Sahin, and T. Akin, “An Anaysis
to Improve Stability of Drive-Mode Oscillations in Capacitive Vibratory MEMS
Gyroscopes,” The 22nd IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2009),
pp. 817-820, Sorrento, Italy, Jan. 2009. 10.1109/MEMSYS.2009.4805508
73) B. Boğa,
I. E. Ocak, H. Külah, and T. Akin, “Modeling of a Capacitive ∑-∆
MEMS Accelerometer System including the Noise Components and Verification with
Test Results,” The 22th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2009),
pp. 821-824, Sorrento, Italy, Jan. 2009. 10.1109/MEMSYS.2009.4805509
72) K.Sahin,
E. Sahin, S. E. Alper, and T. Akin, “A Wide-Bandwidth and
High-Sensitivity Robust Microgyroscope,” 19th
MicroMechanics Europe Workshop (MME 2008), pp.
97-100, Aachen, Germany, September 28-30, 2008. 10.1088/0960-1317/19/7/074004
71) R. Kepenek, I.E. Ocak , H. Kulah, and T. Akin,
“A micro-g Resolution Microaccelerometer System with
a Second-Order Sigma-Delta Readout Circuitry”, Conf. on PhD Research in
Microelectronics and Electronics, pp. 41-44, Istanbul, Turkey, Jun 22-25, 2008.
10.1109/RME.2008.4595720
70) K. Topalli, O. Bayraktar, M. Unlu, O. Aydin Civi, S. Demir,
and T. Akin, “Reconfigurable
Antennas by RF MEMS Technology,” 30th ESA Antenna Workshop on
Antennas for Earth Observation, Science, Telecommunications and Navigation
Space Missions, pp.497-500, Noordwijk, The
Netherlands, 27-30 May 2008.
69) M. Tepegoz,
F. Civitci, and T.
Akin, “An Optimum Reference Detector Design for Uncooled Microbolometer
FPAs,” SPIE Defense and Security
Symposium, Infrared Technology and
Applications XXXIV, SPIE Vol.
6940, pp. 694028/1-8, March 2008. 10.1117/12.786611
68)
M. Y. Tanrikulu, F. Civitci,
and T. Akin, “A New Method to Estimate the Absorption
Coefficient for Uncooled Infrared Detectors,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIV, SPIE Vol. 6940, pp. 694027/1-7, March
2008. 10.1117/12.786610
67)
M. Tepegoz, A. Toprak, and T. Akin, “A Low Power Readout Circuit
Approach for Uncooled Resistive Microbolometer FPAs,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIV, SPIE Vol. 6940, pp. 694026/1-8, March
2008. 10.1117/12.786609
66) K. Topalli,
M. Unlu, I. Istanbulluoglu,
H. I. Atasoy, O. Bayraktar,
O. Aydin Civi, Ş. Demir, S. Koc,
and T. Akin, “Reconfigurable RF MEMS
Devices and Antennas,” 5th International Conference on Electrical and
Electronics Engineering (ELECO 2007), pp.204-209, Bursa, Turkey, 5-9 December
2007.
65) K. Azgin, Y. Temiz, and T. Akin, “A Novel In-Operation High g-Survavible MEMS Gyroscope,” Accepted, The 6th Annual IEEE Conference on Sensors (SENSORS-07),
Atlanta, Georgia, USA, October 28-31, 2007. 10.1109/ICSENS.2007.4388348
64) M.Unlu, H. I. Atasoy, S. Demir, O. Aydin Civi,
S. Koc, and T.
Akin, "Double Stub and Triple Stub RF MEMS Impedance Tuners,"
Proceedings of 8th International Symposium on RF MEMS and RF
Microsystems, MEMSWAVE, Barcelona, Spain, pp.169-172, 26-29 June 2007.
63) K. Topalli, O.
Aydin Civi, S. Demir, S. Koc,
and T. Akin, "Monolithically
Integrated MEMS Phased Array,", Proceedings of 8th
International Symposium on RF MEMS and RF Microsystems, MEMSWAVE, Barcelona,
Spain, pp.119-122, 26-29 June 2007.
62) K.
Topalli, O. Aydin Civi, S.
Demir, S. Koc, and T. Akin, “Dual-Frequency Reconfigurable Slot Dipole Array with a
CPW-Based Feed Network using RF MEMS Technology for X- and Ku-Band Applications,”
2007 IEEE AP-S International Symposium, pp. 825-828, Honolulu, Hawaii, USA,
10-15 June 2007.
61) M. Tepegoz
and T. Akin, “Resistance
Non-Uniformity Correction Method Using Bias Heating for Resistive Uncooled
Microbolometer FPAs,” SPIE Defense and
Security Symposium, Infrared
Technology and Applications
XXXIII, SPIE Vol. 6542, pp.
3T1-8, April 2007. 10.1117/12.726570
60) K. Azgin,
Y. Temiz, and T.
Akin, “An SOI-MEMS Tuning Fork Gyroscope with Linearly Coupled Drive
Mechanism,” The 20th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2007),
pp. 607-610, Kobe, Japan, January 21-25, 2007. 10.1109/MEMSYS.2007.4433080
59) O. Bayraktar,
K. Topalli, M. Unlu, O.
Aydin Civi, S. Demir, and T. Akin, “Beam Switching Reflectarray
using RF MEMS Technology,” European Conference on Antennas and Propagation,
Edinburgh, UK, 11-16 November 2006. 10.1049/ic.2007.1341
58) O. Bayraktar,
K. Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, H.
I. Atasoy, O. A. Civi, S.
Demir, S. Koc, T.
Akin, “Reconfigurable Reflectarray using RF MEMS
Technology,” European Conference on
Antennas and Propagation, Nice, France, 6-10 November 2006. 10.1109/EUCAP.2006.4584967
57) E. Erdil,
K. Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, H.
I. Atasoy, O. Bayraktar, O.
A. Civi, S. Demir, S. Koc, T. Akin, “Reconfigurable Slot Antenna
with Fixed-fixed Beam Type RF MEMS Capacitors,” European Conference on Antennas and Propagation, Nice, France, 6-10
November 2006. 10.1109/EUCAP.2006.4584979
56) T. Akin and H. Kulah, “MEMS and
Microsystem Technologies for Microsensors and Biological Microdevices,” The 7th Workshop on Biosensors and
Bioanalytical u-Techniques in Environmental and Clinical Analysis, Kusadasi, Turkey, September 2006.
55) S. E. Alper, K. M. Silay, and T. Akin, “Tactical-Grade
Silicon-on-Glass Gyroscope with Very-Small Quadrature Coupling,” The 19th
European Conf. on Solid-State Transducers (Eurosensors
XIX), Göteborg, Sweden,
54) K. Topalli,
M. Unlu, O. Aydin Civi, S.
Demir, S. Koc, and T. Akin, “A Monolithic
Phased Array using 3-Bit RF MEMS Phase Shifters,” 2006 IEEE AP-S
International Symposium and USNC/URSI National Radio Science Meeting,
Albuquerque, New Mexico, USA, pp. 517-520, July 2006. 10.1109/TMTT.2007.914377
53) M. Unlu,
K. Topalli, H. I. Atasoy,
E. U. Temocin, I. Istanbulluoglu,
O. Bayraktar, S. Demir, O. A. Civi,
S. Koc, and T.
Akin, “A Reconfigurable RF MEMS Triple Stub Impedance Matching Network,” European Microwave Conference 2006,
Manchester, United Kingdom, pp. 1370-1373, 10-15 September 2006. 10.1109/EUMC.2006.281272
52) H. I. Atasoy, K. Topalli, M. Unlu, I. Istanbulluoglu, O. Bayraktar, E. U. Temocin, S.
Demir, O. A. Civi, S. Koc,
and T. Akin, “Investigation of
On-Wafer TRL Calibration Accuracy Dependence on Transitions and Probe
Positioning,” European Microwave
Conference 2006, Manchester, United Kingdom, pp. 1582-1585, 10-15 September
2006. 10.1109/EUMC.2006.281401
51) H. I. Atasoy, K. Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, O. Bayraktar, S. Demir,
O. Aydin-Civi, S.Koc, and T.Akin,
“Metal-to-metal and capacitive contact RF MEMS shunt switch structures,” 7th
Workshop on MEMS for MilimeterWave Communications
(MEMSWAVE), pp. 154-156, Orvieto, Italy, 27-30 June 2006.
50) M. Unlu,
K. Topalli, H. I. Atasoy,
E. U. Temocin, I. Istanbulluoglu,
O. Bayraktar, S. Demir, O. Aydin-Civi,
S. Koc, and T.
Akin, “A Reconfigurable RF MEMS Impedance Tuner for Impedance Matching of a
Two-Stage Low Noise Amplifier,” 7th Workshop on MEMS for MilimeterWave Communications
(MEMSWAVE), pp. 115-118, Orvieto, Italy, 27-30 June 2006.
49) O. O. Yildirim and T. Akin, “Dynamic resistance nonuniformity compensation circuit for
uncooled microbolometer detector arrays,” Defense
and Security Symposium, 2006, Orlando (Kissimmee), Florida, United States,
Proceedings Volume 6206, Infrared Technology and Applications XXXII;
62061T, May 2006. 10.1117/12.665650
48) S. E. Alper, I. E. Ocak, and T. Akin, “Ultra-Thick and
High-Aspect-Ratio Nickel Microgyroscope Using EFAB TM
Multi-Layer Additive Electroforming,” The
19th IEEE International Conference on Micro Electro Mechanical
Systems (MEMS 2006), pp. 670-673, Istanbul, Turkey, January 22-26, 2006. 10.1109/MEMSYS.2006.1627888
47) S. E. Alper, K. Azgin, and T. Akin, “High-Performance SOI-MEMS
Gyroscope with Decoupled Oscillation Modes,” The 19th IEEE International Conference on Micro Electro
Mechanical Systems (MEMS 2006), pp. 70-73, Istanbul, Turkey,
46) S. E. Alper, K. M. Silay, and T. Akin, “A Low-Cost Rate-Grade Nickel Microgyroscope,” The 19th European Conf. on Solid-State
Transducers (Eurosensors XIX), Barcelona, Spain,
45) S. Onat,
M. Unlu, L. Alatan, S.
Demir, and T. Akin, “Design of a
re-configurable dual frequency microstrip antenna with integrated RF MEMS
switches,” IEEE Antennas and Propagation
Society International Symposium, Volume: 2A, pp 384- 387, 3-8 July 2005. 10.1109/APS.2005.1551823
44) E. Erdil,
K. Topalli, O. Aydin Civi,
and T. Akin, “Reconfigurable CPW-Fed
Dual-Frequency Rectangular Slot Antenna Using RF MEMS Technology,” 2005 AP-S International Symposium and USNC/URSI
National Radio Science Meeting, Vol. 2A, pp. 392-395, Washington, DC, 3-8
July 2005. 10.1109/APS.2005.1551825
43) E. Erdil,
S. Onat, K. Topalli, I. Istanbulluoglu, M. Unlu, S.
Demir, L. Alatan, O. Aydin Civi,
S. Koc, and T.
Akin, “Reconfigurable Antenna Structures Using MEMS Technology,” 6th Workshop on MEMS for MilimeterWave
Communications (MEMSWAVE), pp. 35-38, Switzerland, 23-24 June 2005.
42) M. Unlu,
K. Topalli, S. Demir, O. Aydin Civi,
S. Koc, and T.
Akin, “A Parametric Study On Modeling Distributed Mems Transmission
Lines”, 34th European Microwave Conference, pp.1157-1160, Amsterdam, The Netherlands, October 11‑15,
2004.
41) M. Unlu,
K. Topalli, S. Demir, O. Aydin Civi,
S. Koc, and T.
Akin, “Design and Modeling of a Reconfigurable Triple Stub Impedance
Matching Network using Distributed MEMS Transmission Lines,” 5th Workshop on MEMS for MilimeterWave
Communications (MEMSWAVE), pp. I17-I20, Uppsala, Sweden, 30 June-2 July
2004.
40) K. Topalli,
M. Unlu, S. Demir, O. Aydin Civi,
S. Koc, and T.
Akin, “A Parametric Modeling Study on Distributed MEMS Transmission Lines,”
5th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. I13-I16
Uppsala, Sweden, 30 June-2 July 2004.
39) K. Topalli, M. Unlu, H.
Sagkol, S. Demir, O. Aydin Civi,
S. Koc, and T.
Akin, “A New Model for Distributed MEMS Transmission Lines,” 2004 AP-S International Symposium and
USNC/URSI National Radio Science Meeting, pp. 2855-2858, Monterey,
California, 20-26 June 2004. 10.1109/APS.2004.1331972
38) B. Okcan and T.
Akin, “A Thermal Conductivity Based Humidity Sensor in a Standard CMOS
Process,” The 17th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS 2004),
pp. 552-555, Maastricht, The Netherlands,
37) S.E. Alper and T. Akin,
“A Symmetrical and Decoupled Nickel Microgyroscope on
Insulating Substrate,” The 17th European Conf. on
Solid-State Transducers (Eurosensors XVII), pp. 24-27, Guimaraes, Portugal,
September 21-24, 2003. 10.1016/j.sna.2004.04.041
36) M. Tepegoz
and T. Akin, “A Redout Circuit for
QWIP Infrared Detector Arrays using Current Mirroring Integration,” European Solid-State Circuits Conference
(ESSCIRC 2003), pp. 133-136, Estoril, Portugal,
September 16-18, 2003. 10.1109/ESSCIRC.2003.1257090
35) D. Harris and T. Akin, “A Cross-Cultural VLSI Design
Project,” The American
Society for Engineering Education (ASEE) 2003 Annual Conference, Nashville,
Tennessee,
34) S. Eminoglu,
M.Y. Tanrikulu, and T. Akin, “A Low-Cost 64x64 Uncooled Infrared Detector Arrays in
Standard CMOS,” The 12th Int. Conf. on Solid-State
Sensors and Actuators (TRANSDUCERS'03, Eurosensors
XV), pp. 316-319, Boston, Massachusetts, June 8-12, 2003. 10.1109/SENSOR.2003.1215316
33) S.E. Alper and T. Akin,
“A Single-Crystal Silicon Symmetrical and Decoupled Gyroscope on Insulating
Substrate,” The 12th Int. Conf. on Solid-State Sensors and Actuators
(TRANSDUCERS'03, Eurosensors XV), pp. 1399-1402,
Boston, Massachusetts, June 8-12, 2003. 10.1109/sensor.2003.1217036
32) S. Eminoglu,
M.Y. Tanrikulu, and T. Akin, “Low-Cost Uncooled Infrared Detector Arrays in Standard
CMOS,” SPIE AeroSense
Symposium, Infrared Technology and Applications XXIX (Aerosense
2003), SPIE Vol. 5074, pp. 425-436, Orlando, Florida, April 21-25, 2003. 10.1117/12.488185
31) B. Koç,
D. Basaran, T.
Akin, and A. Erden, “Design of a Piezoelectric Ultrasonic Motor for
Micro-Robotic Application,” Int. Conf.
Mechatronic Design and Modeling, pp. 205-219, Ürgüp,
Turkey, Sept. 2002.
30) S. Eminoglu,
D. Sabuncuoglu Tezcan, M.Y.
Tanrikulu, and T. Akin, "Low-Cost Uncooled
Infrared Detectors in CMOS Process," The 16th European Conf. on
Solid-State Transducers (Eurosensors XVI), pp. 480-483, Prague, Czech Republic,
September 15-18, 2002. 10.1016/j.sna.2003.08.013
29) S.E. Alper and T. Akin, "A Symmetrical and Decoupled
Microgyroscope with Electroforming Process on
Insulating Substrate," The 16th European Conf. on Solid-State
Transducers (Eurosensors XVI), pp. 814-817, Prague, Czech Republic,
September 15-18, 2002.
28) M. Ünlü,
K. Topalli, H. Sagkol,
S. Demir, Ö. Aydin Çivi, S. Koç,
and T. Akin, "New MEMS Swich Structures
for Antenna Applications," 2002 IEEE AP-S International Symposium and
USNC/URSI National Radio Science Meeting, p.134, San Antonio, Texas, 16-21
June 2002.
27) M. Ünlü,
K. Topalli, H. Sagkol,
S. Demir, Ö. Aydin Çivi, S. Koç,
and T. Akin, "RF MEMS Adjustable Impedance Matching Network and
Adjustable Power Divider," 2002 IEEE AP-S International Symposium and
USNC/URSI National Radio Science Meeting, pp. 26-29, San Antonio, Texas,
16-21 June 2002. 10.1109/APS.2002.1016020
26) H. Sagkol,
K. Topalli, M. Ünlü, Ö.
Aydin Çivi, S. Koç, S.
Demir, and T. Akin, "A Monolithic Phased Array with RF MEMS Technology,"
2002 IEEE AP-S International Symposium and USNC/URSI National Radio Science
Meeting, pp. 760-763, San Antonio, Texas, 16-21 June 2002. 10.1109/APS.2002.1017094
25) S.E. Alper and T. Akin, "Optimum Designs For
High-Performance Micromachined Gyroscopes," NATO RTO Sensors &
Electronics Technology (RTO-SET) Panel: Symposium on Emerging Military
Capabilities Enabled by Advances in Navigation Sensors, Istanbul, 14-16 October
2002.
24) S. Eminoglu,
M.Y. Tanrikulu, D. Sabuncuoglu
Tezcan, and T. Akin, "A Low-Cost, Small
Pixel Uncooled Infrared Detector for Large Focal Plane Arrays using a Standard
CMOS Process," SPIE AeroSense Symposium,
Infrared Technology and Applications XXVIII (Aerosense
2002), SPIE Vol. 4721, pp. 111-121, Orlando, Florida, April 1-5, 2002. 10.1117/12.478839
23) S.E. Alper and T. Akin, "A Symmetric Surface
Micromachined Gyroscope with Decoupled Oscillation Modes," The 11th
Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'01, Eurosensors XV), pp. 456-459, Munich, Germany,
22) S. Eminoglu,
D.S. Tezcan, and T. Akin, "CMOS N-Well
Microbolometer FPA with Temperature Coefficient Enhancement Circuitry," SPIE
AeroSense Symposium, Infrared Technology and
Applications XXVII (Aerosense 2001), SPIE Vol.
4369, pp. 240-249, Orlando, Florida, April 16-20, 2001. 10.1117/12.445292
21) D.S. Tezcan, S. Eminoglu, O. S. Akar, and T. Akin, "An Uncooled Microbolometer
Infrared Focal Plane Array in Standard CMOS," Photodetector Materials
and Devices VI (Opto-electronics 2001), SPIE Vol. 4288, January 20-26,
2001. 10.1117/12.429399
20) D.S. Tezcan, S. Eminoglu, O. S. Akar, and T. Akin, "A Low Cost Uncooled
Infrared Microbolometer Focal Plane Array Using the CMOS N-Well Layer," The
14th IEEE Int. MicroElectroMechanical Systems Conf.
(MEMS 2001), pp. 566-569, Interlaken, Switzerland, January 21-25, 2001. 10.1109/MEMSYS.2001.906604
19) S.S. Akbay, A. Bircan, and T. Akin,
"A CMOS Visible Image Sensor Array Using Current Mirroring Integration
Readout Circuitry," The 14th European Conf. on Solid-State Transducers
(Eurosensors XIV), pp. 21-24, Copenhagen,
Denmark, August 27-30, 2000. paper19.pdf
18) S.E. Alper and T. Akin, "A Planar Gyroscope Using a
Standard Surface Micromachining Process," The 14th European Conf. on
Solid-State Transducers (Eurosensors XIV), pp.
387-390, Copenhagen, Denmark, August 27-30, 2000. paper18.pdf
17) O. Akar,
T. Akin, T. Harpster, and K. Najafi, "A Wireless Batch Sealed
Absolute Capacitive Pressure Sensor," The 14th European Conf. on
Solid-State Transducers (Eurosensors XIV), pp.
585-588, Copenhagen, Denmark, August 27-30, 2000. 10.1016/S0924-4247(01)00753-1
16) H. Kulah
and T. Akin, "A High Performance Readout Circuit for Infrared Focal
Plane Array Applications," Invited to Design Automation Conference 2000,
Los Angeles, California, June 2000.
15) D.S. Tezcan, F. Kocer, and T. Akin,
"An Uncooled Microbolometer Infrared Detector in any Standard CMOS
Technology," The 10th Int. Conf. on Solid-State Sensors and Actuators
(TRANSDUCERS'99), pp. 610-613, Sendai, Japan,
14) A. Tezel and T. Akin,
"A Low Power Switched-Current Algorithmic A/D Converter," IEEE
Int. Sym. on Circuits and Systems, Vol. I, pp. 282-285, Orlando, Florida,
June 1999. 10.1109/ISCAS.1999.777858
13) H. Kulah
and T. Akin, "An Infrared FPA Readout Circuit Based on Current
Mirroring Integration," SPIE AeroSense
Symposium, Infrared Technology and Applications XXV, SPIE Vol. 3698, pp.
778-788, Orlando, Florida, April 1999. 10.1117/12.354578
12) S. Eminoglu
and T. Akin, "A CAD Environment for Digital Filters using A VerilogHDL Based Functional Bit-Serial Compiler," 10th
Int. Conf. on Microelectronics, Monastir, pp. 91-94, Tunisia, December
1998. 10.1109/ICM.1998.825576
11) H. Kulah
and T. Akin, "A CMOS Current Mirroring Integration Readout
Structure for Infrared Focal Plane Arrays," European Solid-State
Circuits Conference, pp. 468-471, The Hague, The Netherlands, September
1998. 10.1109/esscir.1998.186310
10) Z. Olgun, O. Akar, H. Kulah, and T. Akin, "An Integrated Thermopile Structure with High Responsivity and Detectivity in Any Standard CMOS Technology," Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'97), pp. 1263-1266, Chicago, June 1997. 10.1016/S0924-4247(98)00038-7
9) T. Akin, B. Ziaie, and K. Najafi, "A Modular Micromachined
High-Density Connector for Implantable Biomedical Systems," IEEE
Micro-Electro-Mechanical-Systems Workshop (MEMS-96), pp. 497-502, San
Diego, California, February 1996. 10.1109/MEMSYS.1996.494032
8) R. M. Bradley, T.
Akin, S. Gurkan, X. Cao, and K. Najafi, "Chronic
Recordings from Fibers of Rat Glossopharyngeal Nerve Regenerated Through a
Micromachined Sieve Electrode Array,"” AChemS
XVII (Ass. for Chemoreception Sciences), Sarasota, Florida, April, 1995.
7) T. Akin, K.
Najafi, and R. M. Bradley, "An Implantable Multichannel Digital Neural
Recording System for a Micromachined Sieve Electrode," Digest, Int.
Conf. on Solid-State Sensors and Actuators (TRANSDUCERS’95-EUROSENSORS’IX),
pp. 51-54, Stockholm, June 1995. 10.1109/SENSOR.1995.717081
6) R. M. Bradley, T.
Akin, S. Gurkan, and K. Najafi, "Long Term
Recordings from a Micromachined Sieve Electrode Implanted in the Rat
Glossopharyngeal Nerve," Digest, Society for Neuroscience, Nov.,
1994.
5) T. Akin,
"Silicon Micromachining and Microfabrication Techniques for Integrated
Sensor and Actuator Systems," IEEE Mediterranean Electrotechnical
Conference (MELECON'94), pp. 529-532, Antalya, Turkey, April, 1994. 10.1109/MELCON.1994.381038
4) T. Akin and K.
Najafi, "A telemetricly Powered and Controlled
Implantable Neural Recording System with CMOS Interface Circuitry and
Micromachined Silicon Sieve Electrode," IEEE Mediterranean
Electrotechnical Conference (MELECON'94), pp. 545-548, Antalya, Turkey,
April, 1994. 10.1109/MELCON.1994.381035
3) R. M. Bradley, R. Smoke,
T. Akin, and K. Najafi, "Functional Regeneration of
Glossopharyngeal Nerve Through Micromachined Sieve Electrodes," AChemS XIV (Ass. for Chemoreception Sciences),
April, 1992. 10.1016/0006-8993(92)91031-9
2) T. Akin and K.
Najafi, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration
Applications," IEEE Int. Conf. on Solid-State Sensors and Actuators
(TRANSDUCERS'91), pp. 128-131, San Francisco, CA, June 1991. 10.1109/10.284958
1) T. Akin, B. Ziaie, and K. Najafi, "RF Telemetry Powering and
Control of Hermetically-Sealed Integrated Sensors and Actuators," Digest,
IEEE Solid-State Sensors and Actuators Workshop, pp. 145-148, Hilton Head,
SC, June 1990. 10.1109/solsen.1990.109840
National Journal and Conference Publications
28) E. Yıldırım, T. Akin ve M. A. S. Arıkan
“MEMS Malzeme Karakterizasyonu
için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı
ve Gerçekleştirilmesi,”
Çankaya Üniversitesi
Journal of Science and Engineering, Vol. 9 No. 1, pp.9-23, Ankara, Şubat 2012 (in Turkish).
27) O. Bayraktar, O. Aydın-Civi ve T. Akin “RF
MEMS Anahtarlı Ayarlanabilir
Yansıtıcı Dizi Anteni,”
URSI Türkiye 5.
Bilimsel Kongresi,
pp.132-135, Ankara, Ağustos 2010 (in Turkish).
26) M. F.
Toy, O. Ferhanoglu, O. Akar,
T. Akin, H. Ürey,
"Sogutmasiz Kizilötesi
Termomekanik Algilayici Tasarimi, Üretimi ve Testi," 10. Ulusal Fotonik Çalistayi, Kocaeli Üniversitesi, Kocaeli, Ekim 2008 (in Turkish)
25) C. Cetintepe, S. Demir, and T. Akin, "RF MEMS Teknolojisi ile S-Bandi Tumlesik
Bant-Geciren Filtre Yapisi," URSI-Türkiye 2008
4. Bilimsel Kongresi, s.
137-140, Ekim 2008, Antalya (in Turkish).
24) K. Topalli, I. Comart, S. Demir, and
T. Akin, "RF MEMS Yapıların Glass Frit ile
0-seviye Paketlenmesi," URSI-Türkiye
2008 4. Bilimsel Kongresi,
s. 110-113, Ekim 2008, Antalya (in Turkish).
23) E. Ekmekci, K. Topalli, and T. Akin, G. Turhan-Sayan,
"RF-MEMS Anahtarlama Teknigi
ile AHR Tipi Metamalzemelerde
Manyetik Rezonans Frekansinin Adaptif Bicimde Ayarlanmasi," URSI-Türkiye 2008 4. Bilimsel Kongresi, s. 106-109, Ekim 2008,
Antalya (in Turkish).
22) T. Akin, “Radio Frequency Micro-Electro-Mechanical
Systems (RF MEMS),” Invited, National
URSI Symposium Turkey, p. 11, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in
Turkish).
21) E. U. Temoçin, K. Topalli, M. Ünlü, I. Istanbulluoglu, H. I. Atasoy, , Ö. Bayraktar, S. Demir,
Ö. Aydin Çivi, S. Koç, T. Akin, “Esdüzlemsel
Dalga Klavuzundan Mikroserit Hatta Geçis Üzerine Çalismalar,” National URSI Symposium Turkey, pp.
448-450, Hacettepe, Ankara, Türkiye,
6-8 Eylül 2006 (in Turkish).
20) Ö. Bayraktar,
K. Topalli, M. Ünlü, I. Istanbulluoglu, E. U. Temoçin, H.
I. Atasoy, S. Demir, Ö. Aydin Çivi,
S. Koç, T.
Akin, “RF MEMS Teknolojisi ile
Yansitici Dizi Anteni Tasarimi,” National
URSI Symposium Turkey, pp. 438-440, Hacettepe,
Ankara, Türkiye, 6-8 Eylül
2006 (in Turkish).
19) H. I. Atasoy, M. Ünlü, K. Topalli, I. Istanbulluoglu, E. U.
Temoçin, Ö. Bayraktar, S.
Demir, Ö. Aydin Çivi, S. Koç,
T. Akin, “TRL Kalibrasyonunda
Uç Konumlandirmasi ve Geçislerin Etkileri,”
National URSI Symposium Turkey, pp.
426-428, Hacettepe, Ankara, Türkiye,
6-8 Eylül 2006 (in Turkish).
18) I. Istanbulluoglu,
K. Topalli, E. U. Temoçin,
H. I. Atasoy, M. Ünlü, Ö. Bayraktar, S. Demir, Ö. Aydin Çivi,
S. Koç, T.
Akin, “RF MEMS Tekonolojisi Kullanilarak
Tasarlanmis Ayarlanabilir
Bant Geçiren Baglanmis-Hat Süzgeç,” National
URSI Symposium Turkey, pp. 416-418, Hacettepe,
Ankara, Türkiye, 6-8 Eylül
2006 (in Turkish).
17) K. Topalli,
M. Ünlü, Ö. Aydin Çivi, S.
Demir, S. Koç, T.
Akin, “RF MEMS Teknolojisi ile
Tek Parça Faz Dizili Anten Yapisi,”
National URSI Symposium Turkey, pp.
413-415, Hacettepe, Ankara, Türkiye,
6-8 Eylül 2006 (in Turkish).
16) H. I. Atasoy, K. Topalli, M. Ünlü, I. Istanbulluoglu, E. U. Temoçin, Ö. Bayraktar, S. Demir,
Ö. Aydin Çivi, S. Koç, T. Akin, “RF MEMS Tekonolojisi
ile Kapasitif ve Metal-Metal Baglantili Paralel Anahtar Yapilari”, National
URSI Symposium Turkey, pp. 410-412, Hacettepe,
Ankara, Türkiye, 6-8 Eylül
2006 (in Turkish).
15) Mehmet Ünlü, Kagan Topalli, Simsek Demir, Özlem Aydin Çivi, Sencer Koç, T. Akin, “RF MEMS Teknolojisi ile Ayarlanabilir Empedans Uyumlama Devresi,” National
URSI Symposium Turkey, pp. 407-409, Hacettepe,
Ankara, Türkiye, 6-8 Eylül
2006 (in Turkish).
14) E. Erdil,
K. Topalli, M. Ünlü, Ö. Aydın Çivi, T. Akin, “RF MEMS Kapasitörler
ile Rezonans Frekansi Ayarlanabilen Antenler,” National
URSI Symposium Turkey, pp. 404-406, Hacettepe,
Ankara, Türkiye, 6-8 Eylül
2006 (in Turkish).
13) Ö. Pasin,
T. Akin, “RF MEMS Yapilarinin Vakum Testi Için Pirani Gauge,” National URSI Symposium Turkey, pp.
386-388, Hacettepe, Ankara, Türkiye,
6-8 Eylül 2006 (in Turkish).
12) K. Topalli,
M. Unlu, S. Demir, O. Aydin Civi,
S. Koc, and T.
Akin, “RF MEMS teknolojisi ile
mikroserit ve esduzlemsel dalga kilavuzu hat ustunde paralel anahtar yapilari,” National
URSI Symposium Turkey, pp. 370-372, 8-10 September 2004 (in Turkish).
11) M. Unlu,
K. Topalli, S. Demir, O. Aydin Civi,
S. Koc, and T.
Akin, “Siralanmis MEMS iletim
hatlari icin yeni bir model,” National
URSI Symposium Turkey, pp. 435-437, 8-10 September 2004 (in Turkish).
10) K. Topalli, H. Sagkol, M. Ünlü, Ö. Aydin Çivi, S. Demir, S.
Koç ve T. Akin, "RF MEMS Teknolojisi ile Faz Dizili
Anten," URSI-Türkiye'2002,
s. 134-137, Eylül 2002 (in Turkish).
9) H. Sagkol,
M. Ünlü, K. Topalli, Ö.
Aydin Çivi, S. Demir, S. Koç
ve T. Akin,
"RF MEMS Teknolojisi ile
Mikrodalga Faz Kaydiricilari," URSI-Türkiye'2002,
s. 138-141, Eylül 2002 (in Turkish).
8) M. Ünlü,
H. Sagkol, K. Topalli, Ö.
Aydin Çivi, S. Demir, S. Koç
ve T. Akin,
"RF MEMS Teknolojisi ile
Ayarlanabilir Empedans Uyumlama ve Güç
Bölücü Devreleri," URSI-Türkiye'2002, s. 142-145, Eylül 2002 (in Turkish).
7) M. Ünlü,
H. Sagkol, K. Topalli, Ö.
Aydin Çivi, S. Demir, S. Koç
ve T. Akin,
"Anten Uygulamalari için Yeni MEMS Anahtar Yapilari," URSI-Türkiye'2002,
s. 146-149, Eylül 2002 (in Turkish).
6) H. Kulah
ve T. Akin, "CMOS Elektronik
Devreli PtSi Schottky-Bariyer Kızılötesi Gece-Görüş Dedektörü," Kaynak
Elektrik Dergisi, Sayfa 103-110, 1997/1 (in Turkish).
5) Tayfun Akin,
"Mikro-Elektro-Mekanik Sistemler
(MEMS) ve Silisyum Mikroisleme Teknikleri," Elektrik-Elektronik-Bilgisayar Muhendisligi
7. Ulusal Kongresi, Cagrili Bildiri, Eylul, 1997 (in Turkish).
4) Z. Olgun,
O. Akar, H. Kulah ve T. Akin, "Standart
CMOS Teknolojisi ile Üretilebilen Isılküme Tipi Kızılötesi Dedektörler," Elektrik-Elektronik-Bilgisayar
Muhendisligi 7. Ulusal Kongresi, s. 75-78, Eylul, 1997
(in Turkish).
3) O. Akar
ve T. Akin, "Endüstriyel
ve Biyomedikal Uygulamaları için Silisyum Mikroişlenmiş Kapasitif Basınç Sensörü," Elektrik-Elektronik-Bilgisayar
Muhendisligi 7. Ulusal Kongresi, s. 83-86, Eylul, 1997
(in Turkish).
2) H. Kulah
ve T. Akin, "PtSi
Schottky-Bariyer Gece-Görüş
Dedektörü ve CMOS Elektronik
Okuma Devresi Tasarımı,"
Elektrik-Elektronik-Bilgisayar Muhendisligi
7. Ulusal Kongresi, s.
79-82, Eylul, 1997 (in Turkish).
1) Tayfun Akin,
"Micro-Electro-Mechanical Systems (MEMS) and Silicon Micromachining
Technologies," Digest, IEEE Conf. for Electrical & Computer
Engineering Students, pp. 43-48, Bogazici
University, September 1997.